A differential electrometer based on coupled microresonators

This paper introduces a micromachined electrometer with high resolution and wide dynamic range. The sensor is made of electrically coupled microresonators. The input signal modifies the coupling strength between the microresonators, and hence, results in a change in the location of system poles. Add...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hajhashemi, M. S., Bahreyni, B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Capacitance Couplings Electrodes Electrostatics Resonant frequency Sensitivity Springs
Online-Zugang:	Volltext bestellen
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