A differential electrometer based on coupled microresonators

A differential electrometer based on coupled microresonators

This paper introduces a micromachined electrometer with high resolution and wide dynamic range. The sensor is made of electrically coupled microresonators. The input signal modifies the coupling strength between the microresonators, and hence, results in a change in the location of system poles. Add...

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Hauptverfasser: Hajhashemi, M. S., Bahreyni, B.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitance
Couplings
Electrodes
Electrostatics
Resonant frequency
Sensitivity
Springs
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description This paper introduces a micromachined electrometer with high resolution and wide dynamic range. The sensor is made of electrically coupled microresonators. The input signal modifies the coupling strength between the microresonators, and hence, results in a change in the location of system poles. Additionally, using opposite polarities for the bias voltages of the resonators leads to moving of the resonance frequencies away from each other. This produces a differential signal with high sensitivity compared to devices made from a single resonator. In addition to the high sensitivity, another advantage of this sensor is its robustness against manufacturing tolerances and interfering parameters such as temperature variations.
doi_str_mv 10.1109/ICSENS.2012.6411178
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S.</creatorcontrib><creatorcontrib>Bahreyni, B.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hajhashemi, M. 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subjects Capacitance
Couplings
Electrodes
Electrostatics
Resonant frequency
Sensitivity
Springs
title A differential electrometer based on coupled microresonators
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