Sensitivity improvement in FSI CIS using the M1ToP™ smart process technique
Using the W damascene process in the pixel area, M1Top pixel structure was developed. Because the M1Top pixel structure does not use the metal2 layer in the pixel block, total stack height becomes much thinner than normal pixels. From this new structure, sensitivity and QE in 1.75um pixels have been...
Gespeichert in:
| Hauptverfasser: | , , , , , , , , , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 319 |
|---|---|
| container_issue | |
| container_start_page | 317 |
| container_title | |
| container_volume | |
| creator | Manlyun Ha Sun Choi DongHun Cho Hosoo Kim Jungyeon Cho Youngsun Oh Jongman Kim Sangwon Yoon Changhoon Choi Juneseok Lee Juil Lee Joon Hwang |
| description | Using the W damascene process in the pixel area, M1Top pixel structure was developed. Because the M1Top pixel structure does not use the metal2 layer in the pixel block, total stack height becomes much thinner than normal pixels. From this new structure, sensitivity and QE in 1.75um pixels have been improved by 50% from that of normal M2Top pixels in 0.11um CIS process. |
| doi_str_mv | 10.1109/ISOCC.2012.6407104 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_6407104</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>6407104</ieee_id><sourcerecordid>6407104</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-ab18a576f194b4cab1828010434734477f04d7b97fb9c6bbe9c4f22cf6b5540b3</originalsourceid><addsrcrecordid>eNotkF9Kw0AYxFdEUGsuoC97gdT98yWbfZRgbaClQupzya7f2hWT1uy20HdP4tE8iRHzNAzMDD-GkFvOppwzfV_Vq7KcCsbFNAemOIMzkmhVcMiVFFozeU6uR1NouCRJCO-MsaGsBrkiyxq74KM_-niivt33uyO22EXqOzqrK1pWNT0E373RuEW65Ovd88_XNw1t00c6pC2GQCPabec_D3hDLlzzETAZdUJeZo_rcp4uVk9V-bBIPVdZTBvDiyZTueMaDNg_Kwo2wEtQEkApx-BVGa2c0TY3BrUFJ4R1uckyYEZOyN3_rkfEzb73A85pMz4gfwG0w09-</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Sensitivity improvement in FSI CIS using the M1ToP™ smart process technique</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Manlyun Ha ; Sun Choi ; DongHun Cho ; Hosoo Kim ; Jungyeon Cho ; Youngsun Oh ; Jongman Kim ; Sangwon Yoon ; Changhoon Choi ; Juneseok Lee ; Juil Lee ; Joon Hwang</creator><creatorcontrib>Manlyun Ha ; Sun Choi ; DongHun Cho ; Hosoo Kim ; Jungyeon Cho ; Youngsun Oh ; Jongman Kim ; Sangwon Yoon ; Changhoon Choi ; Juneseok Lee ; Juil Lee ; Joon Hwang</creatorcontrib><description>Using the W damascene process in the pixel area, M1Top pixel structure was developed. Because the M1Top pixel structure does not use the metal2 layer in the pixel block, total stack height becomes much thinner than normal pixels. From this new structure, sensitivity and QE in 1.75um pixels have been improved by 50% from that of normal M2Top pixels in 0.11um CIS process.</description><identifier>ISBN: 1467329894</identifier><identifier>ISBN: 9781467329897</identifier><identifier>EISBN: 9781467329903</identifier><identifier>EISBN: 1467329886</identifier><identifier>EISBN: 1467329908</identifier><identifier>EISBN: 9781467329880</identifier><identifier>DOI: 10.1109/ISOCC.2012.6407104</identifier><language>eng</language><publisher>IEEE</publisher><subject>Angular Response ; Apertures ; Lenses ; Logic gates ; M1Top pixel ; M2Top pixel ; Metals ; Microoptics ; Optical sensors ; Sensitivity</subject><ispartof>2012 International SoC Design Conference (ISOCC), 2012, p.317-319</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6407104$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6407104$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Manlyun Ha</creatorcontrib><creatorcontrib>Sun Choi</creatorcontrib><creatorcontrib>DongHun Cho</creatorcontrib><creatorcontrib>Hosoo Kim</creatorcontrib><creatorcontrib>Jungyeon Cho</creatorcontrib><creatorcontrib>Youngsun Oh</creatorcontrib><creatorcontrib>Jongman Kim</creatorcontrib><creatorcontrib>Sangwon Yoon</creatorcontrib><creatorcontrib>Changhoon Choi</creatorcontrib><creatorcontrib>Juneseok Lee</creatorcontrib><creatorcontrib>Juil Lee</creatorcontrib><creatorcontrib>Joon Hwang</creatorcontrib><title>Sensitivity improvement in FSI CIS using the M1ToP™ smart process technique</title><title>2012 International SoC Design Conference (ISOCC)</title><addtitle>ISOCC</addtitle><description>Using the W damascene process in the pixel area, M1Top pixel structure was developed. Because the M1Top pixel structure does not use the metal2 layer in the pixel block, total stack height becomes much thinner than normal pixels. From this new structure, sensitivity and QE in 1.75um pixels have been improved by 50% from that of normal M2Top pixels in 0.11um CIS process.</description><subject>Angular Response</subject><subject>Apertures</subject><subject>Lenses</subject><subject>Logic gates</subject><subject>M1Top pixel</subject><subject>M2Top pixel</subject><subject>Metals</subject><subject>Microoptics</subject><subject>Optical sensors</subject><subject>Sensitivity</subject><isbn>1467329894</isbn><isbn>9781467329897</isbn><isbn>9781467329903</isbn><isbn>1467329886</isbn><isbn>1467329908</isbn><isbn>9781467329880</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2012</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkF9Kw0AYxFdEUGsuoC97gdT98yWbfZRgbaClQupzya7f2hWT1uy20HdP4tE8iRHzNAzMDD-GkFvOppwzfV_Vq7KcCsbFNAemOIMzkmhVcMiVFFozeU6uR1NouCRJCO-MsaGsBrkiyxq74KM_-niivt33uyO22EXqOzqrK1pWNT0E373RuEW65Ovd88_XNw1t00c6pC2GQCPabec_D3hDLlzzETAZdUJeZo_rcp4uVk9V-bBIPVdZTBvDiyZTueMaDNg_Kwo2wEtQEkApx-BVGa2c0TY3BrUFJ4R1uckyYEZOyN3_rkfEzb73A85pMz4gfwG0w09-</recordid><startdate>201211</startdate><enddate>201211</enddate><creator>Manlyun Ha</creator><creator>Sun Choi</creator><creator>DongHun Cho</creator><creator>Hosoo Kim</creator><creator>Jungyeon Cho</creator><creator>Youngsun Oh</creator><creator>Jongman Kim</creator><creator>Sangwon Yoon</creator><creator>Changhoon Choi</creator><creator>Juneseok Lee</creator><creator>Juil Lee</creator><creator>Joon Hwang</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201211</creationdate><title>Sensitivity improvement in FSI CIS using the M1ToP™ smart process technique</title><author>Manlyun Ha ; Sun Choi ; DongHun Cho ; Hosoo Kim ; Jungyeon Cho ; Youngsun Oh ; Jongman Kim ; Sangwon Yoon ; Changhoon Choi ; Juneseok Lee ; Juil Lee ; Joon Hwang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-ab18a576f194b4cab1828010434734477f04d7b97fb9c6bbe9c4f22cf6b5540b3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Angular Response</topic><topic>Apertures</topic><topic>Lenses</topic><topic>Logic gates</topic><topic>M1Top pixel</topic><topic>M2Top pixel</topic><topic>Metals</topic><topic>Microoptics</topic><topic>Optical sensors</topic><topic>Sensitivity</topic><toplevel>online_resources</toplevel><creatorcontrib>Manlyun Ha</creatorcontrib><creatorcontrib>Sun Choi</creatorcontrib><creatorcontrib>DongHun Cho</creatorcontrib><creatorcontrib>Hosoo Kim</creatorcontrib><creatorcontrib>Jungyeon Cho</creatorcontrib><creatorcontrib>Youngsun Oh</creatorcontrib><creatorcontrib>Jongman Kim</creatorcontrib><creatorcontrib>Sangwon Yoon</creatorcontrib><creatorcontrib>Changhoon Choi</creatorcontrib><creatorcontrib>Juneseok Lee</creatorcontrib><creatorcontrib>Juil Lee</creatorcontrib><creatorcontrib>Joon Hwang</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Manlyun Ha</au><au>Sun Choi</au><au>DongHun Cho</au><au>Hosoo Kim</au><au>Jungyeon Cho</au><au>Youngsun Oh</au><au>Jongman Kim</au><au>Sangwon Yoon</au><au>Changhoon Choi</au><au>Juneseok Lee</au><au>Juil Lee</au><au>Joon Hwang</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Sensitivity improvement in FSI CIS using the M1ToP™ smart process technique</atitle><btitle>2012 International SoC Design Conference (ISOCC)</btitle><stitle>ISOCC</stitle><date>2012-11</date><risdate>2012</risdate><spage>317</spage><epage>319</epage><pages>317-319</pages><isbn>1467329894</isbn><isbn>9781467329897</isbn><eisbn>9781467329903</eisbn><eisbn>1467329886</eisbn><eisbn>1467329908</eisbn><eisbn>9781467329880</eisbn><abstract>Using the W damascene process in the pixel area, M1Top pixel structure was developed. Because the M1Top pixel structure does not use the metal2 layer in the pixel block, total stack height becomes much thinner than normal pixels. From this new structure, sensitivity and QE in 1.75um pixels have been improved by 50% from that of normal M2Top pixels in 0.11um CIS process.</abstract><pub>IEEE</pub><doi>10.1109/ISOCC.2012.6407104</doi><tpages>3</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 1467329894 |
| ispartof | 2012 International SoC Design Conference (ISOCC), 2012, p.317-319 |
| issn | |
| language | eng |
| recordid | cdi_ieee_primary_6407104 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Angular Response Apertures Lenses Logic gates M1Top pixel M2Top pixel Metals Microoptics Optical sensors Sensitivity |
| title | Sensitivity improvement in FSI CIS using the M1ToP™ smart process technique |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-22T16%3A54%3A16IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Sensitivity%20improvement%20in%20FSI%20CIS%20using%20the%20M1ToP%E2%84%A2%20smart%20process%20technique&rft.btitle=2012%20International%20SoC%20Design%20Conference%20(ISOCC)&rft.au=Manlyun%20Ha&rft.date=2012-11&rft.spage=317&rft.epage=319&rft.pages=317-319&rft.isbn=1467329894&rft.isbn_list=9781467329897&rft_id=info:doi/10.1109/ISOCC.2012.6407104&rft_dat=%3Cieee_6IE%3E6407104%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=9781467329903&rft.eisbn_list=1467329886&rft.eisbn_list=1467329908&rft.eisbn_list=9781467329880&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=6407104&rfr_iscdi=true |