Some technological and encapsulation issues of SAWS manufactured on langasite

This paper presents some aspects encountered in fabrication of surface acoustic wave (SAW) manufactured on langasite substrate. Results obtained after the first electrical test didn't correspond to our expectations, although all devices passed through on optical inspection. It followed the de-c...

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Bibliographische Detailangaben

Hauptverfasser:	Dumbravescu, N., Buiculescu, V.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	failure mechanism langasite Metals Optical surface waves Ovens SAW Sputtering Substrates Surface acoustic wave devices Surface acoustic waves technological and encapsulation issues
Online-Zugang:	Volltext
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