Some technological and encapsulation issues of SAWS manufactured on langasite
This paper presents some aspects encountered in fabrication of surface acoustic wave (SAW) manufactured on langasite substrate. Results obtained after the first electrical test didn't correspond to our expectations, although all devices passed through on optical inspection. It followed the de-c...
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| creator | Dumbravescu, N. Buiculescu, V. |
| description | This paper presents some aspects encountered in fabrication of surface acoustic wave (SAW) manufactured on langasite substrate. Results obtained after the first electrical test didn't correspond to our expectations, although all devices passed through on optical inspection. It followed the de-capsulation of defective devices and the searching for failure causes. We detected several such mechanisms and after fixing them, we encapsulated and tested again the devices. Now, all devices were functioning properly. Comparative results of electrical test (before and after fixing the failure) are given. |
| doi_str_mv | 10.1109/SMICND.2012.6400646 |
| format | Conference Proceeding |
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Comparative results of electrical test (before and after fixing the failure) are given.</description><subject>failure mechanism</subject><subject>langasite</subject><subject>Metals</subject><subject>Optical surface waves</subject><subject>Ovens</subject><subject>SAW</subject><subject>Sputtering</subject><subject>Substrates</subject><subject>Surface acoustic wave devices</subject><subject>Surface acoustic waves</subject><subject>technological and encapsulation issues</subject><issn>1545-827X</issn><issn>2377-0678</issn><isbn>9781467307376</isbn><isbn>1467307378</isbn><isbn>9781467307383</isbn><isbn>1467307386</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2012</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>ESBDL</sourceid><sourceid>RIE</sourceid><recordid>eNpVkMtOwkAYhcdbIkGegM28QPGfC3NZElQkAV2URHfk71xwTGkJ0y58e5vIxtVZfMmXcw4hUwYzxsA-ltv18u1pxoHxmZIASqorMrHaMKm0AC2MuCYjLrQuQGlz849pdUtGbC7nheH6855Mcv4GgEGsrJIjsi3bY6BdcF9NW7eH5LCm2HgaGoen3NfYpbahKec-ZNpGWi4-SnrEpo_ouv4cPB1wjc0Bc-rCA7mLWOcwueSY7F6ed8vXYvO-Wi8XmyJZ6IoKhbcYASVnPjhnTRTcGucrHWWQbD404074WGlfcca9MWYYXjlheRUFiDGZ_mlTCGF_Oqcjnn_2l2_EL3XeVMs</recordid><startdate>201210</startdate><enddate>201210</enddate><creator>Dumbravescu, N.</creator><creator>Buiculescu, V.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>ESBDL</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201210</creationdate><title>Some technological and encapsulation issues of SAWS manufactured on langasite</title><author>Dumbravescu, N. ; Buiculescu, V.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-ba3d9af0a421decc98f3298cdb7f4e4159642c3dfb7db212d888640bc392bf303</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2012</creationdate><topic>failure mechanism</topic><topic>langasite</topic><topic>Metals</topic><topic>Optical surface waves</topic><topic>Ovens</topic><topic>SAW</topic><topic>Sputtering</topic><topic>Substrates</topic><topic>Surface acoustic wave devices</topic><topic>Surface acoustic waves</topic><topic>technological and encapsulation issues</topic><toplevel>online_resources</toplevel><creatorcontrib>Dumbravescu, N.</creatorcontrib><creatorcontrib>Buiculescu, V.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Open Access Journals</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dumbravescu, N.</au><au>Buiculescu, V.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Some technological and encapsulation issues of SAWS manufactured on langasite</atitle><btitle>CAS 2012 (International Semiconductor Conference)</btitle><stitle>SMICND</stitle><date>2012-10</date><risdate>2012</risdate><volume>1</volume><spage>227</spage><epage>230</epage><pages>227-230</pages><issn>1545-827X</issn><eissn>2377-0678</eissn><isbn>9781467307376</isbn><isbn>1467307378</isbn><eisbn>9781467307383</eisbn><eisbn>1467307386</eisbn><abstract>This paper presents some aspects encountered in fabrication of surface acoustic wave (SAW) manufactured on langasite substrate. Results obtained after the first electrical test didn't correspond to our expectations, although all devices passed through on optical inspection. It followed the de-capsulation of defective devices and the searching for failure causes. We detected several such mechanisms and after fixing them, we encapsulated and tested again the devices. Now, all devices were functioning properly. Comparative results of electrical test (before and after fixing the failure) are given.</abstract><pub>IEEE</pub><doi>10.1109/SMICND.2012.6400646</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1545-827X |
| ispartof | CAS 2012 (International Semiconductor Conference), 2012, Vol.1, p.227-230 |
| issn | 1545-827X 2377-0678 |
| language | eng |
| recordid | cdi_ieee_primary_6400646 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | failure mechanism langasite Metals Optical surface waves Ovens SAW Sputtering Substrates Surface acoustic wave devices Surface acoustic waves technological and encapsulation issues |
| title | Some technological and encapsulation issues of SAWS manufactured on langasite |
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