Coupled fluid-thermo-structures simulation methodology for MEMS applications

A coupled fluid-thermo-structures solution methodology is being developed for application to MEMS. State-of-the-art computational methods are used for simulation of a wide variety of MEMS types and configurations. The proposed software is aimed to be powerful and accurate, yet simple and quick enoug...

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Bibliographische Detailangaben
Hauptverfasser: Athavale, M.M., Yang, H.Q., Przekwas, A.J.
Format: Tagungsbericht
Sprache:eng
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