Coupled fluid-thermo-structures simulation methodology for MEMS applications
A coupled fluid-thermo-structures solution methodology is being developed for application to MEMS. State-of-the-art computational methods are used for simulation of a wide variety of MEMS types and configurations. The proposed software is aimed to be powerful and accurate, yet simple and quick enoug...
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| creator | Athavale, M.M. Yang, H.Q. Przekwas, A.J. |
| description | A coupled fluid-thermo-structures solution methodology is being developed for application to MEMS. State-of-the-art computational methods are used for simulation of a wide variety of MEMS types and configurations. The proposed software is aimed to be powerful and accurate, yet simple and quick enough to be included in the design cycles of microfluidic devices for performance predictions and device optimization. A distinct feature of the present computational methodology is the fully implicit numerical coupling between all disciplines. A description of the various solver modules is presented. The accuracy of the current software is validated on a benchmark quality experiments of a flow in a microchannel and fluid-structure interaction case. The versatility is demonstrated on two practical microfluidic devices. |
| doi_str_mv | 10.1109/SENSOR.1997.635364 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_635364</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>635364</ieee_id><sourcerecordid>635364</sourcerecordid><originalsourceid>FETCH-LOGICAL-i104t-908b2859acfef3b8efc1cdf61c958d3799181c151ed3b94471abc2bc1fe01eb43</originalsourceid><addsrcrecordid>eNotj81qhDAUhQOl0DL1BWaVF9DmGqPJsoj9AacDtV0PGm86KbERExfz9h06czjwbQ4fHEK2wDIAph675r3bf2SgVJWVXPCyuCGJqiQ7l3OZq_KOJCH8sHMKIaBi96St_To7HKlxqx3TeMRl8mmIy6rjumCgwU6r66P1v3TCePSjd_77RI1f6K7ZdbSfZ2f1_yA8kFvTu4DJlRvy9dx81q9pu395q5_a1AIrYqqYHHIpVK8NGj5INBr0aErQSsiRV0qBBA0CcOSDKooK-kHngwaDDHAo-IZsL16LiId5sVO_nA6Xy_wPwotOuQ</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Coupled fluid-thermo-structures simulation methodology for MEMS applications</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Athavale, M.M. ; Yang, H.Q. ; Przekwas, A.J.</creator><creatorcontrib>Athavale, M.M. ; Yang, H.Q. ; Przekwas, A.J.</creatorcontrib><description>A coupled fluid-thermo-structures solution methodology is being developed for application to MEMS. State-of-the-art computational methods are used for simulation of a wide variety of MEMS types and configurations. The proposed software is aimed to be powerful and accurate, yet simple and quick enough to be included in the design cycles of microfluidic devices for performance predictions and device optimization. A distinct feature of the present computational methodology is the fully implicit numerical coupling between all disciplines. A description of the various solver modules is presented. The accuracy of the current software is validated on a benchmark quality experiments of a flow in a microchannel and fluid-structure interaction case. The versatility is demonstrated on two practical microfluidic devices.</description><identifier>ISBN: 9780780338296</identifier><identifier>ISBN: 0780338294</identifier><identifier>DOI: 10.1109/SENSOR.1997.635364</identifier><language>eng</language><publisher>IEEE</publisher><subject>Application software ; Computational fluid dynamics ; Computational modeling ; Design optimization ; Fluid flow ; Microchannel ; Microelectromechanical devices ; Microfluidics ; Micromechanical devices ; Micropumps</subject><ispartof>Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 1997, Vol.2, p.1043-1046 vol.2</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/635364$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2056,4040,4041,27916,54911</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/635364$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Athavale, M.M.</creatorcontrib><creatorcontrib>Yang, H.Q.</creatorcontrib><creatorcontrib>Przekwas, A.J.</creatorcontrib><title>Coupled fluid-thermo-structures simulation methodology for MEMS applications</title><title>Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)</title><addtitle>SENSOR</addtitle><description>A coupled fluid-thermo-structures solution methodology is being developed for application to MEMS. State-of-the-art computational methods are used for simulation of a wide variety of MEMS types and configurations. The proposed software is aimed to be powerful and accurate, yet simple and quick enough to be included in the design cycles of microfluidic devices for performance predictions and device optimization. A distinct feature of the present computational methodology is the fully implicit numerical coupling between all disciplines. A description of the various solver modules is presented. The accuracy of the current software is validated on a benchmark quality experiments of a flow in a microchannel and fluid-structure interaction case. The versatility is demonstrated on two practical microfluidic devices.</description><subject>Application software</subject><subject>Computational fluid dynamics</subject><subject>Computational modeling</subject><subject>Design optimization</subject><subject>Fluid flow</subject><subject>Microchannel</subject><subject>Microelectromechanical devices</subject><subject>Microfluidics</subject><subject>Micromechanical devices</subject><subject>Micropumps</subject><isbn>9780780338296</isbn><isbn>0780338294</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1997</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj81qhDAUhQOl0DL1BWaVF9DmGqPJsoj9AacDtV0PGm86KbERExfz9h06czjwbQ4fHEK2wDIAph675r3bf2SgVJWVXPCyuCGJqiQ7l3OZq_KOJCH8sHMKIaBi96St_To7HKlxqx3TeMRl8mmIy6rjumCgwU6r66P1v3TCePSjd_77RI1f6K7ZdbSfZ2f1_yA8kFvTu4DJlRvy9dx81q9pu395q5_a1AIrYqqYHHIpVK8NGj5INBr0aErQSsiRV0qBBA0CcOSDKooK-kHngwaDDHAo-IZsL16LiId5sVO_nA6Xy_wPwotOuQ</recordid><startdate>1997</startdate><enddate>1997</enddate><creator>Athavale, M.M.</creator><creator>Yang, H.Q.</creator><creator>Przekwas, A.J.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1997</creationdate><title>Coupled fluid-thermo-structures simulation methodology for MEMS applications</title><author>Athavale, M.M. ; Yang, H.Q. ; Przekwas, A.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i104t-908b2859acfef3b8efc1cdf61c958d3799181c151ed3b94471abc2bc1fe01eb43</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1997</creationdate><topic>Application software</topic><topic>Computational fluid dynamics</topic><topic>Computational modeling</topic><topic>Design optimization</topic><topic>Fluid flow</topic><topic>Microchannel</topic><topic>Microelectromechanical devices</topic><topic>Microfluidics</topic><topic>Micromechanical devices</topic><topic>Micropumps</topic><toplevel>online_resources</toplevel><creatorcontrib>Athavale, M.M.</creatorcontrib><creatorcontrib>Yang, H.Q.</creatorcontrib><creatorcontrib>Przekwas, A.J.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Athavale, M.M.</au><au>Yang, H.Q.</au><au>Przekwas, A.J.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Coupled fluid-thermo-structures simulation methodology for MEMS applications</atitle><btitle>Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)</btitle><stitle>SENSOR</stitle><date>1997</date><risdate>1997</risdate><volume>2</volume><spage>1043</spage><epage>1046 vol.2</epage><pages>1043-1046 vol.2</pages><isbn>9780780338296</isbn><isbn>0780338294</isbn><abstract>A coupled fluid-thermo-structures solution methodology is being developed for application to MEMS. State-of-the-art computational methods are used for simulation of a wide variety of MEMS types and configurations. The proposed software is aimed to be powerful and accurate, yet simple and quick enough to be included in the design cycles of microfluidic devices for performance predictions and device optimization. A distinct feature of the present computational methodology is the fully implicit numerical coupling between all disciplines. A description of the various solver modules is presented. The accuracy of the current software is validated on a benchmark quality experiments of a flow in a microchannel and fluid-structure interaction case. The versatility is demonstrated on two practical microfluidic devices.</abstract><pub>IEEE</pub><doi>10.1109/SENSOR.1997.635364</doi></addata></record> |
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| identifier | ISBN: 9780780338296 |
| ispartof | Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 1997, Vol.2, p.1043-1046 vol.2 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Application software Computational fluid dynamics Computational modeling Design optimization Fluid flow Microchannel Microelectromechanical devices Microfluidics Micromechanical devices Micropumps |
| title | Coupled fluid-thermo-structures simulation methodology for MEMS applications |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T06%3A10%3A05IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Coupled%20fluid-thermo-structures%20simulation%20methodology%20for%20MEMS%20applications&rft.btitle=Proceedings%20of%20International%20Solid%20State%20Sensors%20and%20Actuators%20Conference%20(Transducers%20'97)&rft.au=Athavale,%20M.M.&rft.date=1997&rft.volume=2&rft.spage=1043&rft.epage=1046%20vol.2&rft.pages=1043-1046%20vol.2&rft.isbn=9780780338296&rft.isbn_list=0780338294&rft_id=info:doi/10.1109/SENSOR.1997.635364&rft_dat=%3Cieee_6IE%3E635364%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=635364&rfr_iscdi=true |