A fast method for conductivity type determination in thin SOI films

The doping of Silicon-on-Insulator (SOI) thin films can be substantially modified during wafer fabrication, when compared to bulk starting material. Conductivity type identification thus appears as one of the first electrical characterizations to be made on SOI wafers and there is a need for a fast...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Henaux, S., Mondon, F., Reimbold, G.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Conducting materials Conductive films Conductivity Doping Electric resistance Fabrication Hall effect Probes Semiconductor thin films Silicon on insulator technology
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