Geometrical analysis of a MEMS microphone

This document presents a study of variations in a MEMS microphone geometry in order to find the best compromise between its capacitance response and its size. It has been shown that COMSOL can achieve accurate results when compared to theoretical models. This is an excellent advantage due to the res...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Rivadeneyra, A., Martinez-Marti, F., Palma, A. J., Banqueri, J., Bernardo, R. M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Analytical models Capacitance capacitive microphone Frequency response Geometry Integrated circuit modeling MEMS sensor Micromechanical devices Microphones mushroom shape PolyMUMPs process
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