Geometrical analysis of a MEMS microphone
This document presents a study of variations in a MEMS microphone geometry in order to find the best compromise between its capacitance response and its size. It has been shown that COMSOL can achieve accurate results when compared to theoretical models. This is an excellent advantage due to the res...
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| creator | Rivadeneyra, A. Martinez-Marti, F. Palma, A. J. Banqueri, J. Bernardo, R. M. |
| description | This document presents a study of variations in a MEMS microphone geometry in order to find the best compromise between its capacitance response and its size. It has been shown that COMSOL can achieve accurate results when compared to theoretical models. This is an excellent advantage due to the results of the simulation can provide not only verification concerning the validity of the physical assumptions made in defining the model but also simulations can be used to help determine the design parameters that will optimize the device performance thus minimizing the time, effort, and expense required to construct and test an actual device. |
| doi_str_mv | 10.1109/SMACD.2012.6339444 |
| format | Conference Proceeding |
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| ispartof | 2012 International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012, p.169-172 |
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| language | eng |
| recordid | cdi_ieee_primary_6339444 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Analytical models Capacitance capacitive microphone Frequency response Geometry Integrated circuit modeling MEMS sensor Micromechanical devices Microphones mushroom shape PolyMUMPs process |
| title | Geometrical analysis of a MEMS microphone |
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