Fixed Beam Moving Stage electron beam lithography of waveguide coupling device structures

Fixed Beam Moving Stage electron beam lithography of waveguide coupling device structures

The Fixed Beam Moving Stage (FBMS) lithography mode is used toward the fabrication of waveguide coupling device structures. Scanning electron microscope metrology is used for the dimensional characterization of the resulting waveguide structures.

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Bibliographische Detailangaben
Hauptverfasser: Sanabia, J. E., Burcham, K. E., Klingfus, J., Piaszenski, G., Kahl, M., Jede, R.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Couplings
Electron beams
Lithography
Optical device fabrication
Optical resonators
Optical waveguides
Performance evaluation
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Beschreibung
Zusammenfassung:The Fixed Beam Moving Stage (FBMS) lithography mode is used toward the fabrication of waveguide coupling device structures. Scanning electron microscope metrology is used for the dimensional characterization of the resulting waveguide structures.
ISSN:2160-8989
2160-9004
DOI:10.1364/CLEO_SI.2012.CM4L.3