A MEMS ultrasonic transducer imager array with beam width, acoustic power, and frequency modulations

Capacitive micromachined ultrasonic transducers (CMUTs) are an alternative imager system to the conventional piezoelectric transducers. They benefit from microfabrication techniques that offer developing CMUTs in various shapes and dimensions, as well as 1- and 2-D arrays. In this work, a CMUT image...

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Bibliographische Detailangaben

Hauptverfasser:	Emadi, T. A., Thomas, G., Buchanan, D. A., Pistorius, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic beams Acoustics Arrays Beam width modulation capacitive micromachined ultrasound transducer (CMUT) directivity pattern microelectromechanical system (MEMS) Micromechanical devices pencil beam Resonant frequency transducer array Transducers Ultrasonic imaging ultrasound imaging XLPE insulation
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