Boron-doped zinc oxide thin films fabricated by ultrasonic spray pyrolysis

Boron doping on the structural, optical and electrical properties in BZO films fabricated by spray pyrolysis were investigated. The carrier concentration of ~10 19 cm -3 and optical transmittance about 90% in the infrared region was achieved.

Bibliographische Detailangaben

Hauptverfasser:	Shao-Yi Lee, Wen-How Lan, Wei-Min Chao, Chun-Wei Tsai, Ming-Chang Shih, Yi-Da Wu, Yi-Chun Chou, Yu-Ting Hsu
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustics Boron Doping Ions Optical films Zinc oxide
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