Boron-doped zinc oxide thin films fabricated by ultrasonic spray pyrolysis

Boron doping on the structural, optical and electrical properties in BZO films fabricated by spray pyrolysis were investigated. The carrier concentration of ~10 19 cm -3 and optical transmittance about 90% in the infrared region was achieved.

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Hauptverfasser: Shao-Yi Lee, Wen-How Lan, Wei-Min Chao, Chun-Wei Tsai, Ming-Chang Shih, Yi-Da Wu, Yi-Chun Chou, Yu-Ting Hsu
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creator Shao-Yi Lee
Wen-How Lan
Wei-Min Chao
Chun-Wei Tsai
Ming-Chang Shih
Yi-Da Wu
Yi-Chun Chou
Yu-Ting Hsu
description Boron doping on the structural, optical and electrical properties in BZO films fabricated by spray pyrolysis were investigated. The carrier concentration of ~10 19 cm -3 and optical transmittance about 90% in the infrared region was achieved.
doi_str_mv 10.1109/OECC.2012.6276781
format Conference Proceeding
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subjects Acoustics
Boron
Doping
Ions
Optical films
Zinc oxide
title Boron-doped zinc oxide thin films fabricated by ultrasonic spray pyrolysis
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