A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors
This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to redu...
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| creator | Wang, Shiwei Koickal, Thomas Jacob Hamilton, A. Mastropaolo, E. Latif, R. Cheung, R. Newton, M. Smith, L. |
| description | This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to reduce the electronic noise of the interface circuit, chopper stabilization technique is implemented, and an effective method to optimize the critical transistor size for best noise performance is derived. Simulation results show that, for a MEMS sensing structure with 200 fF static capacitance, the interface circuit achieves a 0.72 aF equivalent capacitance noise floor over 100 Hz to 20 kHz audio bandwidth. |
| doi_str_mv | 10.1109/ISCAS.2012.6271436 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_6271436</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>6271436</ieee_id><sourcerecordid>6271436</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-99f6d2dd473ebf695ecdeb9206d813f0a9defa6e551eadf4ef04ea3a1ce8c2183</originalsourceid><addsrcrecordid>eNo1kN1KAzEUhOMf2Na-gN7kBVLPSTbZzWUpVQstXlSvS5qcaLS7K5st4tu7YL0ahuEbmGHsFmGGCPZ-tV3MtzMJKGdGllgoc8bGWJhSgURbnbORRF0J1FJfsKktq_-sgks2ggERxWCv2TjnDwAJYOSIreb80H6Lpk2ZeGp66qLzxH3q_DH1PLYd3yw3W-5b_34gJ-pUJ_-ZmjfufHvMffI8U5PbLt-wq-gOmaYnnbDXh-XL4kmsnx9Xi_laJCx1L6yNJsgQilLRPhqryQfaWwkmVKgiOBsoOkNaI7kQC4pQkFMOPVV-GKMm7O6vNxHR7qtLtet-dqdL1C_k1lIy</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Wang, Shiwei ; Koickal, Thomas Jacob ; Hamilton, A. ; Mastropaolo, E. ; Latif, R. ; Cheung, R. ; Newton, M. ; Smith, L.</creator><creatorcontrib>Wang, Shiwei ; Koickal, Thomas Jacob ; Hamilton, A. ; Mastropaolo, E. ; Latif, R. ; Cheung, R. ; Newton, M. ; Smith, L.</creatorcontrib><description>This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to reduce the electronic noise of the interface circuit, chopper stabilization technique is implemented, and an effective method to optimize the critical transistor size for best noise performance is derived. Simulation results show that, for a MEMS sensing structure with 200 fF static capacitance, the interface circuit achieves a 0.72 aF equivalent capacitance noise floor over 100 Hz to 20 kHz audio bandwidth.</description><identifier>ISSN: 0271-4302</identifier><identifier>ISBN: 9781467302180</identifier><identifier>ISBN: 146730218X</identifier><identifier>EISSN: 2158-1525</identifier><identifier>EISBN: 1467302198</identifier><identifier>EISBN: 9781467302173</identifier><identifier>EISBN: 9781467302197</identifier><identifier>EISBN: 1467302171</identifier><identifier>DOI: 10.1109/ISCAS.2012.6271436</identifier><language>eng</language><publisher>IEEE</publisher><subject>Choppers (circuits) ; Micromechanical devices ; Noise ; Parasitic capacitance ; Sensors ; Transistors</subject><ispartof>2012 IEEE International Symposium on Circuits and Systems (ISCAS), 2012, p.1151-1154</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6271436$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6271436$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Wang, Shiwei</creatorcontrib><creatorcontrib>Koickal, Thomas Jacob</creatorcontrib><creatorcontrib>Hamilton, A.</creatorcontrib><creatorcontrib>Mastropaolo, E.</creatorcontrib><creatorcontrib>Latif, R.</creatorcontrib><creatorcontrib>Cheung, R.</creatorcontrib><creatorcontrib>Newton, M.</creatorcontrib><creatorcontrib>Smith, L.</creatorcontrib><title>A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors</title><title>2012 IEEE International Symposium on Circuits and Systems (ISCAS)</title><addtitle>ISCAS</addtitle><description>This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to reduce the electronic noise of the interface circuit, chopper stabilization technique is implemented, and an effective method to optimize the critical transistor size for best noise performance is derived. Simulation results show that, for a MEMS sensing structure with 200 fF static capacitance, the interface circuit achieves a 0.72 aF equivalent capacitance noise floor over 100 Hz to 20 kHz audio bandwidth.</description><subject>Choppers (circuits)</subject><subject>Micromechanical devices</subject><subject>Noise</subject><subject>Parasitic capacitance</subject><subject>Sensors</subject><subject>Transistors</subject><issn>0271-4302</issn><issn>2158-1525</issn><isbn>9781467302180</isbn><isbn>146730218X</isbn><isbn>1467302198</isbn><isbn>9781467302173</isbn><isbn>9781467302197</isbn><isbn>1467302171</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2012</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo1kN1KAzEUhOMf2Na-gN7kBVLPSTbZzWUpVQstXlSvS5qcaLS7K5st4tu7YL0ahuEbmGHsFmGGCPZ-tV3MtzMJKGdGllgoc8bGWJhSgURbnbORRF0J1FJfsKktq_-sgks2ggERxWCv2TjnDwAJYOSIreb80H6Lpk2ZeGp66qLzxH3q_DH1PLYd3yw3W-5b_34gJ-pUJ_-ZmjfufHvMffI8U5PbLt-wq-gOmaYnnbDXh-XL4kmsnx9Xi_laJCx1L6yNJsgQilLRPhqryQfaWwkmVKgiOBsoOkNaI7kQC4pQkFMOPVV-GKMm7O6vNxHR7qtLtet-dqdL1C_k1lIy</recordid><startdate>201205</startdate><enddate>201205</enddate><creator>Wang, Shiwei</creator><creator>Koickal, Thomas Jacob</creator><creator>Hamilton, A.</creator><creator>Mastropaolo, E.</creator><creator>Latif, R.</creator><creator>Cheung, R.</creator><creator>Newton, M.</creator><creator>Smith, L.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201205</creationdate><title>A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors</title><author>Wang, Shiwei ; Koickal, Thomas Jacob ; Hamilton, A. ; Mastropaolo, E. ; Latif, R. ; Cheung, R. ; Newton, M. ; Smith, L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-99f6d2dd473ebf695ecdeb9206d813f0a9defa6e551eadf4ef04ea3a1ce8c2183</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Choppers (circuits)</topic><topic>Micromechanical devices</topic><topic>Noise</topic><topic>Parasitic capacitance</topic><topic>Sensors</topic><topic>Transistors</topic><toplevel>online_resources</toplevel><creatorcontrib>Wang, Shiwei</creatorcontrib><creatorcontrib>Koickal, Thomas Jacob</creatorcontrib><creatorcontrib>Hamilton, A.</creatorcontrib><creatorcontrib>Mastropaolo, E.</creatorcontrib><creatorcontrib>Latif, R.</creatorcontrib><creatorcontrib>Cheung, R.</creatorcontrib><creatorcontrib>Newton, M.</creatorcontrib><creatorcontrib>Smith, L.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Wang, Shiwei</au><au>Koickal, Thomas Jacob</au><au>Hamilton, A.</au><au>Mastropaolo, E.</au><au>Latif, R.</au><au>Cheung, R.</au><au>Newton, M.</au><au>Smith, L.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors</atitle><btitle>2012 IEEE International Symposium on Circuits and Systems (ISCAS)</btitle><stitle>ISCAS</stitle><date>2012-05</date><risdate>2012</risdate><spage>1151</spage><epage>1154</epage><pages>1151-1154</pages><issn>0271-4302</issn><eissn>2158-1525</eissn><isbn>9781467302180</isbn><isbn>146730218X</isbn><eisbn>1467302198</eisbn><eisbn>9781467302173</eisbn><eisbn>9781467302197</eisbn><eisbn>1467302171</eisbn><abstract>This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to reduce the electronic noise of the interface circuit, chopper stabilization technique is implemented, and an effective method to optimize the critical transistor size for best noise performance is derived. Simulation results show that, for a MEMS sensing structure with 200 fF static capacitance, the interface circuit achieves a 0.72 aF equivalent capacitance noise floor over 100 Hz to 20 kHz audio bandwidth.</abstract><pub>IEEE</pub><doi>10.1109/ISCAS.2012.6271436</doi><tpages>4</tpages></addata></record> |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Choppers (circuits) Micromechanical devices Noise Parasitic capacitance Sensors Transistors |
| title | A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-06T16%3A15%3A31IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=A%20low-noise%20interface%20circuit%20for%20MEMS%20cochlea-mimicking%20acoustic%20sensors&rft.btitle=2012%20IEEE%20International%20Symposium%20on%20Circuits%20and%20Systems%20(ISCAS)&rft.au=Wang,%20Shiwei&rft.date=2012-05&rft.spage=1151&rft.epage=1154&rft.pages=1151-1154&rft.issn=0271-4302&rft.eissn=2158-1525&rft.isbn=9781467302180&rft.isbn_list=146730218X&rft_id=info:doi/10.1109/ISCAS.2012.6271436&rft_dat=%3Cieee_6IE%3E6271436%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1467302198&rft.eisbn_list=9781467302173&rft.eisbn_list=9781467302197&rft.eisbn_list=1467302171&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=6271436&rfr_iscdi=true |