Error compensation of grating interferometer due to angular error of linear stage

Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holograph...

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Bibliographische Detailangaben

Hauptverfasser:	Fan, K. C., Zhang, Y. L., Miao, J. W., Cheng, F.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Adaptive optics Diffraction Diffraction gratings Error compensation Gratings Laser beams Optical interferometry
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