Error compensation of grating interferometer due to angular error of linear stage

Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holograph...

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Hauptverfasser:	Fan, K. C., Zhang, Y. L., Miao, J. W., Cheng, F.
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Sprache:	eng
Schlagworte:	Adaptive optics Diffraction Diffraction gratings Error compensation Gratings Laser beams Optical interferometry
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creator	Fan, K. C. Zhang, Y. L. Miao, J. W. Cheng, F.
description	Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holographic grating. Because the emitted beams are separated on the grating plane, the yaw error of the stage during motion will cause the optical path difference of the two beams resulting in phase shift. This study investigates the influence of the yaw error. Experiments show that after yaw error compensation, the LDGI readings can be significantly improved.
doi_str_mv	10.1109/AIM.2012.6265886
format	Conference Proceeding
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C. ; Zhang, Y. L. ; Miao, J. W. ; Cheng, F.</creator><creatorcontrib>Fan, K. C. ; Zhang, Y. L. ; Miao, J. W. ; Cheng, F.</creatorcontrib><description>Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holographic grating. Because the emitted beams are separated on the grating plane, the yaw error of the stage during motion will cause the optical path difference of the two beams resulting in phase shift. This study investigates the influence of the yaw error. Experiments show that after yaw error compensation, the LDGI readings can be significantly improved.</description><identifier>ISSN: 2159-6247</identifier><identifier>ISBN: 1467325759</identifier><identifier>ISBN: 9781467325752</identifier><identifier>EISSN: 2159-6255</identifier><identifier>EISBN: 9781467325769</identifier><identifier>EISBN: 9781467325745</identifier><identifier>EISBN: 1467325767</identifier><identifier>EISBN: 1467325740</identifier><identifier>DOI: 10.1109/AIM.2012.6265886</identifier><language>eng</language><publisher>IEEE</publisher><subject>Adaptive optics ; Diffraction ; Diffraction gratings ; Error compensation ; Gratings ; Laser beams ; Optical interferometry</subject><ispartof>2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2012, p.428-431</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6265886$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6265886$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Fan, K. 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Experiments show that after yaw error compensation, the LDGI readings can be significantly improved.</description><subject>Adaptive optics</subject><subject>Diffraction</subject><subject>Diffraction gratings</subject><subject>Error compensation</subject><subject>Gratings</subject><subject>Laser beams</subject><subject>Optical interferometry</subject><issn>2159-6247</issn><issn>2159-6255</issn><isbn>1467325759</isbn><isbn>9781467325752</isbn><isbn>9781467325769</isbn><isbn>9781467325745</isbn><isbn>1467325767</isbn><isbn>1467325740</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2012</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo9UEtLw0AYXF9grbkLXvYPpO772z2WUrVQEUHPZZt8G1aSbNmkB_-9QaunmWEehyHkjrMF58w9LDcvC8G4WBhhtLXmjBQOLFcGpNBg3DmZCa5daYTWF-Tmz9Du8t9QcE2KYfhkjHFmtRByRt7WOadMq9QdsB_8GFNPU6BNnmjf0NiPmAPm1OFEaH1EOibq--bY-kzxpzvF29jjpIfRN3hLroJvByxOOCcfj-v31XO5fX3arJbbMgrFxzIAZ3tfOYvCcqiUrx14J4FJbeqgbG2DAQXS8j0wJQxaw50HBxVUknkl5-T-dzci4u6QY-fz1-70jvwGNRJTyQ</recordid><startdate>201207</startdate><enddate>201207</enddate><creator>Fan, K. C.</creator><creator>Zhang, Y. L.</creator><creator>Miao, J. W.</creator><creator>Cheng, F.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201207</creationdate><title>Error compensation of grating interferometer due to angular error of linear stage</title><author>Fan, K. C. ; Zhang, Y. L. ; Miao, J. W. ; Cheng, F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i241t-f710bac98e2817c4ad97a9370356df48d8f6747381b70426e8619a797c7c30a43</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Adaptive optics</topic><topic>Diffraction</topic><topic>Diffraction gratings</topic><topic>Error compensation</topic><topic>Gratings</topic><topic>Laser beams</topic><topic>Optical interferometry</topic><toplevel>online_resources</toplevel><creatorcontrib>Fan, K. C.</creatorcontrib><creatorcontrib>Zhang, Y. L.</creatorcontrib><creatorcontrib>Miao, J. W.</creatorcontrib><creatorcontrib>Cheng, F.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Fan, K. C.</au><au>Zhang, Y. L.</au><au>Miao, J. W.</au><au>Cheng, F.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Error compensation of grating interferometer due to angular error of linear stage</atitle><btitle>2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)</btitle><stitle>AIM</stitle><date>2012-07</date><risdate>2012</risdate><spage>428</spage><epage>431</epage><pages>428-431</pages><issn>2159-6247</issn><eissn>2159-6255</eissn><isbn>1467325759</isbn><isbn>9781467325752</isbn><eisbn>9781467325769</eisbn><eisbn>9781467325745</eisbn><eisbn>1467325767</eisbn><eisbn>1467325740</eisbn><abstract>Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holographic grating. Because the emitted beams are separated on the grating plane, the yaw error of the stage during motion will cause the optical path difference of the two beams resulting in phase shift. This study investigates the influence of the yaw error. Experiments show that after yaw error compensation, the LDGI readings can be significantly improved.</abstract><pub>IEEE</pub><doi>10.1109/AIM.2012.6265886</doi><tpages>4</tpages></addata></record>
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subjects	Adaptive optics Diffraction Diffraction gratings Error compensation Gratings Laser beams Optical interferometry
title	Error compensation of grating interferometer due to angular error of linear stage
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