Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching

In this work, we present for the first time a miniaturized planar W-band dielectric-lens antenna which is micromachined in a 300 µm silicon wafer. The antenna edge comprises a metamaterial anti-reflection geometry in order to reduce parasitic reflections at the free-space to high-permittivity dielec...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Dudorov, Sergey, Topfer, Fritzi, Oberhammer, Joachim
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 3
container_issue
container_start_page 1
container_title
container_volume
creator Dudorov, Sergey
Topfer, Fritzi
Oberhammer, Joachim
description In this work, we present for the first time a miniaturized planar W-band dielectric-lens antenna which is micromachined in a 300 µm silicon wafer. The antenna edge comprises a metamaterial anti-reflection geometry in order to reduce parasitic reflections at the free-space to high-permittivity dielectric interface. Furthermore, the dielectric lens is matched to a standard WR-10 metal waveguide by an optimized tapered dielectric-wedge transition. Prototype lens-antennas were fabricated in a single-mask micromachining process. The radiation pattern for the design frequency of 100 GHz was measured to 13° half-power beam-width in E-plane, a directivity of 14 dB, −15 dB side-lobe level, −15 dB reflected power for almost the whole W-band, for a lens diameter of 10 mm and an operating frequency of 100 GHz.
doi_str_mv 10.1109/MWSYM.2012.6259654
format Conference Proceeding
fullrecord <record><control><sourceid>swepub_6IE</sourceid><recordid>TN_cdi_ieee_primary_6259654</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>6259654</ieee_id><sourcerecordid>oai_DiVA_org_kth_105296</sourcerecordid><originalsourceid>FETCH-LOGICAL-i1286-f7066ffa55619e53786004bd97fef4ea276ae3c9b9830c622b9bd4daab0a6e553</originalsourceid><addsrcrecordid>eNpFkMtOwzAURM1LopT-AGzyAy62E1_Hy6qUh9SKBdDCKrpJblpD4kRJUMXfU9QKZjPSzNEshrErKcZSCnuzWD2_L8ZKSDUGpS3o6IhdyAhMKEUM5pgNlDbAjZJw8l9oe8oGQkaWQ6Tfztmo6z7ETiaW0sYDtly4rK0rzDbOU847V7qs9sGKp-jzoCnRY8tL8l2AvifvMdi6fhNU1GOFPbUOy6BoiXjXYEbBLvtdWl-yswLLjkYHH7LXu9nL9IHPn-4fp5M5d1LFwAsjAIoCtQZpSYcmBiGiNLemoCIiVAaQwsymNg5FBkqlNs2jHDEVCKR1OGR8v9ttqflKk6Z1FbbfSY0uuXXLSVK36-Sz3yRSaGVhx1_veUdEf_Thz_AHVkVmxg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Dudorov, Sergey ; Topfer, Fritzi ; Oberhammer, Joachim</creator><creatorcontrib>Dudorov, Sergey ; Topfer, Fritzi ; Oberhammer, Joachim</creatorcontrib><description>In this work, we present for the first time a miniaturized planar W-band dielectric-lens antenna which is micromachined in a 300 µm silicon wafer. The antenna edge comprises a metamaterial anti-reflection geometry in order to reduce parasitic reflections at the free-space to high-permittivity dielectric interface. Furthermore, the dielectric lens is matched to a standard WR-10 metal waveguide by an optimized tapered dielectric-wedge transition. Prototype lens-antennas were fabricated in a single-mask micromachining process. The radiation pattern for the design frequency of 100 GHz was measured to 13° half-power beam-width in E-plane, a directivity of 14 dB, −15 dB side-lobe level, −15 dB reflected power for almost the whole W-band, for a lens diameter of 10 mm and an operating frequency of 100 GHz.</description><identifier>ISSN: 0149-645X</identifier><identifier>ISBN: 1467310859</identifier><identifier>ISBN: 9781467310857</identifier><identifier>ISBN: 1467310875</identifier><identifier>ISBN: 9781467310871</identifier><identifier>EISSN: 2576-7216</identifier><identifier>EISBN: 1467310867</identifier><identifier>EISBN: 1467310875</identifier><identifier>EISBN: 9781467310864</identifier><identifier>EISBN: 9781467310888</identifier><identifier>EISBN: 1467310883</identifier><identifier>EISBN: 9781467310871</identifier><identifier>DOI: 10.1109/MWSYM.2012.6259654</identifier><language>eng</language><publisher>IEEE</publisher><subject>100 GHz ; Antenna measurements ; Antenna radiation patterns ; Anti-reflection ; Beam widths ; Design frequencies ; Dielectric antenna ; Dielectric interface ; Dielectric lens ; Dielectrics ; Directivity ; E planes ; Fan beams ; Fan-beam ; Lens antennas ; Lenses ; MEMS ; Metal waveguides ; Metamaterial ; Metamaterial antennas ; Metamaterials ; Micromachined ; Micromachining ; Micromachining process ; Microwave antennas ; Operating frequency ; Parasitic reflections ; Permittivity ; Planar lens ; Reflected power ; Side lobes ; Silicon ; Silicon lens ; Silicon wafers ; Single-mask</subject><ispartof>2012 IEEE/MTT-S International Microwave Symposium Digest, 2012, p.1-3</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6259654$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,885,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6259654$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttps://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-105296$$DView record from Swedish Publication Index$$Hfree_for_read</backlink></links><search><creatorcontrib>Dudorov, Sergey</creatorcontrib><creatorcontrib>Topfer, Fritzi</creatorcontrib><creatorcontrib>Oberhammer, Joachim</creatorcontrib><title>Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching</title><title>2012 IEEE/MTT-S International Microwave Symposium Digest</title><addtitle>MWSYM</addtitle><description>In this work, we present for the first time a miniaturized planar W-band dielectric-lens antenna which is micromachined in a 300 µm silicon wafer. The antenna edge comprises a metamaterial anti-reflection geometry in order to reduce parasitic reflections at the free-space to high-permittivity dielectric interface. Furthermore, the dielectric lens is matched to a standard WR-10 metal waveguide by an optimized tapered dielectric-wedge transition. Prototype lens-antennas were fabricated in a single-mask micromachining process. The radiation pattern for the design frequency of 100 GHz was measured to 13° half-power beam-width in E-plane, a directivity of 14 dB, −15 dB side-lobe level, −15 dB reflected power for almost the whole W-band, for a lens diameter of 10 mm and an operating frequency of 100 GHz.</description><subject>100 GHz</subject><subject>Antenna measurements</subject><subject>Antenna radiation patterns</subject><subject>Anti-reflection</subject><subject>Beam widths</subject><subject>Design frequencies</subject><subject>Dielectric antenna</subject><subject>Dielectric interface</subject><subject>Dielectric lens</subject><subject>Dielectrics</subject><subject>Directivity</subject><subject>E planes</subject><subject>Fan beams</subject><subject>Fan-beam</subject><subject>Lens antennas</subject><subject>Lenses</subject><subject>MEMS</subject><subject>Metal waveguides</subject><subject>Metamaterial</subject><subject>Metamaterial antennas</subject><subject>Metamaterials</subject><subject>Micromachined</subject><subject>Micromachining</subject><subject>Micromachining process</subject><subject>Microwave antennas</subject><subject>Operating frequency</subject><subject>Parasitic reflections</subject><subject>Permittivity</subject><subject>Planar lens</subject><subject>Reflected power</subject><subject>Side lobes</subject><subject>Silicon</subject><subject>Silicon lens</subject><subject>Silicon wafers</subject><subject>Single-mask</subject><issn>0149-645X</issn><issn>2576-7216</issn><isbn>1467310859</isbn><isbn>9781467310857</isbn><isbn>1467310875</isbn><isbn>9781467310871</isbn><isbn>1467310867</isbn><isbn>1467310875</isbn><isbn>9781467310864</isbn><isbn>9781467310888</isbn><isbn>1467310883</isbn><isbn>9781467310871</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2012</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFkMtOwzAURM1LopT-AGzyAy62E1_Hy6qUh9SKBdDCKrpJblpD4kRJUMXfU9QKZjPSzNEshrErKcZSCnuzWD2_L8ZKSDUGpS3o6IhdyAhMKEUM5pgNlDbAjZJw8l9oe8oGQkaWQ6Tfztmo6z7ETiaW0sYDtly4rK0rzDbOU847V7qs9sGKp-jzoCnRY8tL8l2AvifvMdi6fhNU1GOFPbUOy6BoiXjXYEbBLvtdWl-yswLLjkYHH7LXu9nL9IHPn-4fp5M5d1LFwAsjAIoCtQZpSYcmBiGiNLemoCIiVAaQwsymNg5FBkqlNs2jHDEVCKR1OGR8v9ttqflKk6Z1FbbfSY0uuXXLSVK36-Sz3yRSaGVhx1_veUdEf_Thz_AHVkVmxg</recordid><startdate>201206</startdate><enddate>201206</enddate><creator>Dudorov, Sergey</creator><creator>Topfer, Fritzi</creator><creator>Oberhammer, Joachim</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope><scope>ADTPV</scope><scope>BNKNJ</scope><scope>D8V</scope></search><sort><creationdate>201206</creationdate><title>Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching</title><author>Dudorov, Sergey ; Topfer, Fritzi ; Oberhammer, Joachim</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i1286-f7066ffa55619e53786004bd97fef4ea276ae3c9b9830c622b9bd4daab0a6e553</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2012</creationdate><topic>100 GHz</topic><topic>Antenna measurements</topic><topic>Antenna radiation patterns</topic><topic>Anti-reflection</topic><topic>Beam widths</topic><topic>Design frequencies</topic><topic>Dielectric antenna</topic><topic>Dielectric interface</topic><topic>Dielectric lens</topic><topic>Dielectrics</topic><topic>Directivity</topic><topic>E planes</topic><topic>Fan beams</topic><topic>Fan-beam</topic><topic>Lens antennas</topic><topic>Lenses</topic><topic>MEMS</topic><topic>Metal waveguides</topic><topic>Metamaterial</topic><topic>Metamaterial antennas</topic><topic>Metamaterials</topic><topic>Micromachined</topic><topic>Micromachining</topic><topic>Micromachining process</topic><topic>Microwave antennas</topic><topic>Operating frequency</topic><topic>Parasitic reflections</topic><topic>Permittivity</topic><topic>Planar lens</topic><topic>Reflected power</topic><topic>Side lobes</topic><topic>Silicon</topic><topic>Silicon lens</topic><topic>Silicon wafers</topic><topic>Single-mask</topic><toplevel>online_resources</toplevel><creatorcontrib>Dudorov, Sergey</creatorcontrib><creatorcontrib>Topfer, Fritzi</creatorcontrib><creatorcontrib>Oberhammer, Joachim</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection><collection>SwePub</collection><collection>SwePub Conference</collection><collection>SWEPUB Kungliga Tekniska Högskolan</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Dudorov, Sergey</au><au>Topfer, Fritzi</au><au>Oberhammer, Joachim</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching</atitle><btitle>2012 IEEE/MTT-S International Microwave Symposium Digest</btitle><stitle>MWSYM</stitle><date>2012-06</date><risdate>2012</risdate><spage>1</spage><epage>3</epage><pages>1-3</pages><issn>0149-645X</issn><eissn>2576-7216</eissn><isbn>1467310859</isbn><isbn>9781467310857</isbn><isbn>1467310875</isbn><isbn>9781467310871</isbn><eisbn>1467310867</eisbn><eisbn>1467310875</eisbn><eisbn>9781467310864</eisbn><eisbn>9781467310888</eisbn><eisbn>1467310883</eisbn><eisbn>9781467310871</eisbn><abstract>In this work, we present for the first time a miniaturized planar W-band dielectric-lens antenna which is micromachined in a 300 µm silicon wafer. The antenna edge comprises a metamaterial anti-reflection geometry in order to reduce parasitic reflections at the free-space to high-permittivity dielectric interface. Furthermore, the dielectric lens is matched to a standard WR-10 metal waveguide by an optimized tapered dielectric-wedge transition. Prototype lens-antennas were fabricated in a single-mask micromachining process. The radiation pattern for the design frequency of 100 GHz was measured to 13° half-power beam-width in E-plane, a directivity of 14 dB, −15 dB side-lobe level, −15 dB reflected power for almost the whole W-band, for a lens diameter of 10 mm and an operating frequency of 100 GHz.</abstract><pub>IEEE</pub><doi>10.1109/MWSYM.2012.6259654</doi><tpages>3</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 0149-645X
ispartof 2012 IEEE/MTT-S International Microwave Symposium Digest, 2012, p.1-3
issn 0149-645X
2576-7216
language eng
recordid cdi_ieee_primary_6259654
source IEEE Electronic Library (IEL) Conference Proceedings
subjects 100 GHz
Antenna measurements
Antenna radiation patterns
Anti-reflection
Beam widths
Design frequencies
Dielectric antenna
Dielectric interface
Dielectric lens
Dielectrics
Directivity
E planes
Fan beams
Fan-beam
Lens antennas
Lenses
MEMS
Metal waveguides
Metamaterial
Metamaterial antennas
Metamaterials
Micromachined
Micromachining
Micromachining process
Microwave antennas
Operating frequency
Parasitic reflections
Permittivity
Planar lens
Reflected power
Side lobes
Silicon
Silicon lens
Silicon wafers
Single-mask
title Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-22T11%3A53%3A17IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-swepub_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Micromachined-silicon%20W-band%20planar-lens%20antenna%20with%20metamaterial%20free-space%20matching&rft.btitle=2012%20IEEE/MTT-S%20International%20Microwave%20Symposium%20Digest&rft.au=Dudorov,%20Sergey&rft.date=2012-06&rft.spage=1&rft.epage=3&rft.pages=1-3&rft.issn=0149-645X&rft.eissn=2576-7216&rft.isbn=1467310859&rft.isbn_list=9781467310857&rft.isbn_list=1467310875&rft.isbn_list=9781467310871&rft_id=info:doi/10.1109/MWSYM.2012.6259654&rft_dat=%3Cswepub_6IE%3Eoai_DiVA_org_kth_105296%3C/swepub_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1467310867&rft.eisbn_list=1467310875&rft.eisbn_list=9781467310864&rft.eisbn_list=9781467310888&rft.eisbn_list=1467310883&rft.eisbn_list=9781467310871&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=6259654&rfr_iscdi=true