Reproduction of microparts based on standard X-ray LIGA processes for mass production

This paper presents a rapid reproduction method of microparts based on the standard X-ray LIGA processes. The SU-8 master mold of microparts is fabricated by X-ray lithography which offers the high aspect ratio microstructure with vertical sidewall for high precision microparts. A 10:1 mixture of pr...

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Bibliographische Detailangaben

Hauptverfasser:	Phatthanakun, R., Pantong, C., Sriphung, C., Pummara, W., Chomnawang, N.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chromium Mass production micromolding microparts Microstructure replicated PDMS Resists Substrates synchrotron light X-ray lithography
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