Vibration-insensitive 61-MHz micromechanical disk reference oscillator
A low phase noise oscillator referenced to a 61-MHz vibrating wine-glass disk resonator with anchor-isolating supports designed to suppress microphonics has posted (without any compensation) a measured acceleration sensitivity at least as good as Γ ~0.2ppb/g for vibration frequencies up to 2kHz and...
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| creator | Naing, T. L. Rocheleau, T. O. Zeying Ren Alon, E. Nguyen, C. T-C |
| description | A low phase noise oscillator referenced to a 61-MHz vibrating wine-glass disk resonator with anchor-isolating supports designed to suppress microphonics has posted (without any compensation) a measured acceleration sensitivity at least as good as Γ ~0.2ppb/g for vibration frequencies up to 2kHz and in all directions, yielding a vector magnitude Γ less than 0.5ppb/g. Remarkably, this result is at least 30 times better than previous work using a similar wine-glass disk resonator and is the best mark among MEMS-based oscillators to date, including those aided by feedback compensation circuits. It is also more than an order of magnitude better than an off-the-shelf crystal oscillator and is now comparable with low sensitivity oven-controlled crystal oscillators (OCXO's). Such low sensitivity to environmental vibration by a tiny uncompensated MEMS-based oscillator is expected to enable harsh environment and military applications that require stable and compact reference oscillators. |
| doi_str_mv | 10.1109/FCS.2012.6243738 |
| format | Conference Proceeding |
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Such low sensitivity to environmental vibration by a tiny uncompensated MEMS-based oscillator is expected to enable harsh environment and military applications that require stable and compact reference oscillators.</description><identifier>ISSN: 2327-1914</identifier><identifier>ISBN: 1457718219</identifier><identifier>ISBN: 9781457718212</identifier><identifier>EISBN: 1457718200</identifier><identifier>EISBN: 9781457718199</identifier><identifier>EISBN: 9781457718205</identifier><identifier>EISBN: 1457718197</identifier><identifier>DOI: 10.1109/FCS.2012.6243738</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acceleration ; acceleration sensitivity ; Crystals ; Frequency measurement ; MEMS ; micromechanical ; microphonics ; oscillator ; Oscillators ; Resonant frequency ; resonator ; RF MEMS ; Sensitivity ; vibration sensitivity ; Vibrations ; wine-glass disk quality factor</subject><ispartof>2012 IEEE International Frequency Control Symposium Proceedings, 2012, p.1-6</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c137t-ea11d15d6bf9a60ae9fde24c8a91329f5bd14d177e13a10b8372d685c3ca88833</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6243738$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6243738$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Naing, T. L.</creatorcontrib><creatorcontrib>Rocheleau, T. O.</creatorcontrib><creatorcontrib>Zeying Ren</creatorcontrib><creatorcontrib>Alon, E.</creatorcontrib><creatorcontrib>Nguyen, C. T-C</creatorcontrib><title>Vibration-insensitive 61-MHz micromechanical disk reference oscillator</title><title>2012 IEEE International Frequency Control Symposium Proceedings</title><addtitle>FCS</addtitle><description>A low phase noise oscillator referenced to a 61-MHz vibrating wine-glass disk resonator with anchor-isolating supports designed to suppress microphonics has posted (without any compensation) a measured acceleration sensitivity at least as good as Γ ~0.2ppb/g for vibration frequencies up to 2kHz and in all directions, yielding a vector magnitude Γ less than 0.5ppb/g. Remarkably, this result is at least 30 times better than previous work using a similar wine-glass disk resonator and is the best mark among MEMS-based oscillators to date, including those aided by feedback compensation circuits. It is also more than an order of magnitude better than an off-the-shelf crystal oscillator and is now comparable with low sensitivity oven-controlled crystal oscillators (OCXO's). Such low sensitivity to environmental vibration by a tiny uncompensated MEMS-based oscillator is expected to enable harsh environment and military applications that require stable and compact reference oscillators.</description><subject>Acceleration</subject><subject>acceleration sensitivity</subject><subject>Crystals</subject><subject>Frequency measurement</subject><subject>MEMS</subject><subject>micromechanical</subject><subject>microphonics</subject><subject>oscillator</subject><subject>Oscillators</subject><subject>Resonant frequency</subject><subject>resonator</subject><subject>RF MEMS</subject><subject>Sensitivity</subject><subject>vibration sensitivity</subject><subject>Vibrations</subject><subject>wine-glass disk quality factor</subject><issn>2327-1914</issn><isbn>1457718219</isbn><isbn>9781457718212</isbn><isbn>1457718200</isbn><isbn>9781457718199</isbn><isbn>9781457718205</isbn><isbn>1457718197</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2012</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFkEtLxDAURiMqOI6zF9z0D6TmJm2TLKXYGWGGWfjYDrfJLUb7kKQI-usVHPDbHM7mLD7GrkHkAMLeNvVjLgXIvJKF0sqcsEsoSq3BSCFO_wXsGVtIJTUHC8UFW6X0Jn6nDUAJC9a8hDbiHKaRhzHRmMIcPimrgO8239kQXJwGcq84Bod95kN6zyJ1FGl0lE3Jhb7HeYpX7LzDPtHqyCV7bu6f6g3f7tcP9d2WO1B65oQAHkpftZ3FSiDZzpMsnEELStqubD0UHrQmUAiiNUpLX5nSKYfGGKWW7OavG4jo8BHDgPHrcPxA_QAfI03V</recordid><startdate>201205</startdate><enddate>201205</enddate><creator>Naing, T. L.</creator><creator>Rocheleau, T. O.</creator><creator>Zeying Ren</creator><creator>Alon, E.</creator><creator>Nguyen, C. T-C</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201205</creationdate><title>Vibration-insensitive 61-MHz micromechanical disk reference oscillator</title><author>Naing, T. L. ; Rocheleau, T. O. ; Zeying Ren ; Alon, E. ; Nguyen, C. T-C</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c137t-ea11d15d6bf9a60ae9fde24c8a91329f5bd14d177e13a10b8372d685c3ca88833</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Acceleration</topic><topic>acceleration sensitivity</topic><topic>Crystals</topic><topic>Frequency measurement</topic><topic>MEMS</topic><topic>micromechanical</topic><topic>microphonics</topic><topic>oscillator</topic><topic>Oscillators</topic><topic>Resonant frequency</topic><topic>resonator</topic><topic>RF MEMS</topic><topic>Sensitivity</topic><topic>vibration sensitivity</topic><topic>Vibrations</topic><topic>wine-glass disk quality factor</topic><toplevel>online_resources</toplevel><creatorcontrib>Naing, T. L.</creatorcontrib><creatorcontrib>Rocheleau, T. O.</creatorcontrib><creatorcontrib>Zeying Ren</creatorcontrib><creatorcontrib>Alon, E.</creatorcontrib><creatorcontrib>Nguyen, C. T-C</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Naing, T. L.</au><au>Rocheleau, T. O.</au><au>Zeying Ren</au><au>Alon, E.</au><au>Nguyen, C. T-C</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Vibration-insensitive 61-MHz micromechanical disk reference oscillator</atitle><btitle>2012 IEEE International Frequency Control Symposium Proceedings</btitle><stitle>FCS</stitle><date>2012-05</date><risdate>2012</risdate><spage>1</spage><epage>6</epage><pages>1-6</pages><issn>2327-1914</issn><isbn>1457718219</isbn><isbn>9781457718212</isbn><eisbn>1457718200</eisbn><eisbn>9781457718199</eisbn><eisbn>9781457718205</eisbn><eisbn>1457718197</eisbn><abstract>A low phase noise oscillator referenced to a 61-MHz vibrating wine-glass disk resonator with anchor-isolating supports designed to suppress microphonics has posted (without any compensation) a measured acceleration sensitivity at least as good as Γ ~0.2ppb/g for vibration frequencies up to 2kHz and in all directions, yielding a vector magnitude Γ less than 0.5ppb/g. Remarkably, this result is at least 30 times better than previous work using a similar wine-glass disk resonator and is the best mark among MEMS-based oscillators to date, including those aided by feedback compensation circuits. It is also more than an order of magnitude better than an off-the-shelf crystal oscillator and is now comparable with low sensitivity oven-controlled crystal oscillators (OCXO's). Such low sensitivity to environmental vibration by a tiny uncompensated MEMS-based oscillator is expected to enable harsh environment and military applications that require stable and compact reference oscillators.</abstract><pub>IEEE</pub><doi>10.1109/FCS.2012.6243738</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 2327-1914 |
| ispartof | 2012 IEEE International Frequency Control Symposium Proceedings, 2012, p.1-6 |
| issn | 2327-1914 |
| language | eng |
| recordid | cdi_ieee_primary_6243738 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acceleration acceleration sensitivity Crystals Frequency measurement MEMS micromechanical microphonics oscillator Oscillators Resonant frequency resonator RF MEMS Sensitivity vibration sensitivity Vibrations wine-glass disk quality factor |
| title | Vibration-insensitive 61-MHz micromechanical disk reference oscillator |
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