Improving defect localization techniques with laser beam with specific analysis and set-up modules

This paper describes a way to improve commonly used static laser stimulation techniques. Several analysis and set-up modules are presented to enrich them. Quickly assembled, combinable and easily adaptable, they allow for example to face atypical failure analysis cases. Effectiveness of this methodo...

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Bibliographische Detailangaben
Hauptverfasser: Llido, R., Gomez, J., Goubier, V., Haller, G., Pouget, V., Lewis, D.
Format: Tagungsbericht
Sprache:eng
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