Performance limits of MEMS switches for power electronics

Advances in semiconductor technology have brought the performance of power transistors near the physical limit. Substantial performance enhancement of power switches will therefore require either new materials, or new devices that obey fundamentally different limits. One of the new power devices tha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Steeneken, Peter G., Wunnicke, O.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Contacts Electric breakdown Force Mathematical model Micromechanical devices Microswitches Transistors
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