A new design of MEMS-based wideband frequency reconfigurable microstrip patch antenna
A new micromachined wideband frequency reconfigurable microstrip patch antenna is demonstrated in this paper. The tunable antenna system is fabricated by a combination of surface and bulk micromachining processes. Thermal actuation is employed to precisely adjust the operating frequency with voltage...
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| creator | Mirzajani, H. Nasiri, M. Ghavifekr, H. B. |
| description | A new micromachined wideband frequency reconfigurable microstrip patch antenna is demonstrated in this paper. The tunable antenna system is fabricated by a combination of surface and bulk micromachining processes. Thermal actuation is employed to precisely adjust the operating frequency with voltage ranges compatible with today's CMOS circuitries. A bulk micromachined silicon membrane containing thermal actuators serves as a platform for antenna patch. The patch is excited by a 50Ω feed line through proximity coupling. The out-of-plane motion of the thermal actuators normal to the antenna surface deflects the patch downward respect to the fixed ground plane. This deflection reduces the air gap height between the antenna patch and feed line and consequently, resonant frequency of the antenna. The effect of initial air gap height on achievable tuning range and bandwidth of the antenna is also investigated and the optimum range is presented. The up-state operating frequency of the antenna is 22.61GHz which continuously can be lowered to 22.17GHz. A tuning range of 440MHz was achieved by a CMOS compatible actuation voltage of 1.5V. The bandwidth of the antenna for up and down-state positions are 1.34 and 1.27GHz respectively. The RF performance of the antenna and its mechanical behavior is investigated by FEM analysis and satisfactory results are obtained within the tuning range. |
| doi_str_mv | 10.1109/ISMA.2012.6215169 |
| format | Conference Proceeding |
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B.</creator><creatorcontrib>Mirzajani, H. ; Nasiri, M. ; Ghavifekr, H. B.</creatorcontrib><description>A new micromachined wideband frequency reconfigurable microstrip patch antenna is demonstrated in this paper. The tunable antenna system is fabricated by a combination of surface and bulk micromachining processes. Thermal actuation is employed to precisely adjust the operating frequency with voltage ranges compatible with today's CMOS circuitries. A bulk micromachined silicon membrane containing thermal actuators serves as a platform for antenna patch. The patch is excited by a 50Ω feed line through proximity coupling. The out-of-plane motion of the thermal actuators normal to the antenna surface deflects the patch downward respect to the fixed ground plane. This deflection reduces the air gap height between the antenna patch and feed line and consequently, resonant frequency of the antenna. The effect of initial air gap height on achievable tuning range and bandwidth of the antenna is also investigated and the optimum range is presented. The up-state operating frequency of the antenna is 22.61GHz which continuously can be lowered to 22.17GHz. A tuning range of 440MHz was achieved by a CMOS compatible actuation voltage of 1.5V. The bandwidth of the antenna for up and down-state positions are 1.34 and 1.27GHz respectively. The RF performance of the antenna and its mechanical behavior is investigated by FEM analysis and satisfactory results are obtained within the tuning range.</description><identifier>ISBN: 9781467308601</identifier><identifier>ISBN: 1467308609</identifier><identifier>EISBN: 9781467308625</identifier><identifier>EISBN: 1467308625</identifier><identifier>EISBN: 1467308617</identifier><identifier>EISBN: 9781467308618</identifier><identifier>DOI: 10.1109/ISMA.2012.6215169</identifier><language>eng</language><publisher>IEEE</publisher><subject>Actuators ; electro-thermal microactuator ; frequency reconfigurable ; Microelectromechanical systems (MEMS) ; micromachining ; Microstrip antennas ; microstrip patch antenna ; Patch antennas ; Resonant frequency ; Silicon ; Tuning ; wideband</subject><ispartof>2012 8th International Symposium on Mechatronics and its Applications, 2012, p.1-6</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6215169$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,27904,54898</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6215169$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Mirzajani, H.</creatorcontrib><creatorcontrib>Nasiri, M.</creatorcontrib><creatorcontrib>Ghavifekr, H. B.</creatorcontrib><title>A new design of MEMS-based wideband frequency reconfigurable microstrip patch antenna</title><title>2012 8th International Symposium on Mechatronics and its Applications</title><addtitle>ISMA</addtitle><description>A new micromachined wideband frequency reconfigurable microstrip patch antenna is demonstrated in this paper. The tunable antenna system is fabricated by a combination of surface and bulk micromachining processes. Thermal actuation is employed to precisely adjust the operating frequency with voltage ranges compatible with today's CMOS circuitries. A bulk micromachined silicon membrane containing thermal actuators serves as a platform for antenna patch. The patch is excited by a 50Ω feed line through proximity coupling. The out-of-plane motion of the thermal actuators normal to the antenna surface deflects the patch downward respect to the fixed ground plane. This deflection reduces the air gap height between the antenna patch and feed line and consequently, resonant frequency of the antenna. The effect of initial air gap height on achievable tuning range and bandwidth of the antenna is also investigated and the optimum range is presented. The up-state operating frequency of the antenna is 22.61GHz which continuously can be lowered to 22.17GHz. A tuning range of 440MHz was achieved by a CMOS compatible actuation voltage of 1.5V. The bandwidth of the antenna for up and down-state positions are 1.34 and 1.27GHz respectively. The RF performance of the antenna and its mechanical behavior is investigated by FEM analysis and satisfactory results are obtained within the tuning range.</description><subject>Actuators</subject><subject>electro-thermal microactuator</subject><subject>frequency reconfigurable</subject><subject>Microelectromechanical systems (MEMS)</subject><subject>micromachining</subject><subject>Microstrip antennas</subject><subject>microstrip patch antenna</subject><subject>Patch antennas</subject><subject>Resonant frequency</subject><subject>Silicon</subject><subject>Tuning</subject><subject>wideband</subject><isbn>9781467308601</isbn><isbn>1467308609</isbn><isbn>9781467308625</isbn><isbn>1467308625</isbn><isbn>1467308617</isbn><isbn>9781467308618</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2012</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVkM1OAjEURmuMiQZ5AOOmLzB4205_ZkkIKgnEBbgmt9NbrIGCnSGEt9cENn6bk7M5i4-xJwEjIaB5mS0X45EEIUdGCi1Mc8OGjXWiNlaBM1Lf_nMQ92zYdd_wNwtKW_nAPsc804kH6tIm833ki-liWXnsKPBTCuQxBx4L_Rwpt2deqN3nmDbHgn5LfJfasu_6kg78gH37xTH3lDM-sruI246GVw7Y6nW6mrxX84-32WQ8r1IDfRXAOiVFDDU0ZJwiH1CaWKNro3XoKRrla-1cDQixtt6BdpoE6mCC0V4N2PMlm4hofShph-W8vn6hfgFzLlKZ</recordid><startdate>201204</startdate><enddate>201204</enddate><creator>Mirzajani, H.</creator><creator>Nasiri, M.</creator><creator>Ghavifekr, H. B.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201204</creationdate><title>A new design of MEMS-based wideband frequency reconfigurable microstrip patch antenna</title><author>Mirzajani, H. ; Nasiri, M. ; Ghavifekr, H. B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-d078321fd409e683ebda26f4a8cf78abef63b458840a0f47b80585e1a5d6d65b3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Actuators</topic><topic>electro-thermal microactuator</topic><topic>frequency reconfigurable</topic><topic>Microelectromechanical systems (MEMS)</topic><topic>micromachining</topic><topic>Microstrip antennas</topic><topic>microstrip patch antenna</topic><topic>Patch antennas</topic><topic>Resonant frequency</topic><topic>Silicon</topic><topic>Tuning</topic><topic>wideband</topic><toplevel>online_resources</toplevel><creatorcontrib>Mirzajani, H.</creatorcontrib><creatorcontrib>Nasiri, M.</creatorcontrib><creatorcontrib>Ghavifekr, H. B.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE/IET Electronic Library</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Mirzajani, H.</au><au>Nasiri, M.</au><au>Ghavifekr, H. B.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A new design of MEMS-based wideband frequency reconfigurable microstrip patch antenna</atitle><btitle>2012 8th International Symposium on Mechatronics and its Applications</btitle><stitle>ISMA</stitle><date>2012-04</date><risdate>2012</risdate><spage>1</spage><epage>6</epage><pages>1-6</pages><isbn>9781467308601</isbn><isbn>1467308609</isbn><eisbn>9781467308625</eisbn><eisbn>1467308625</eisbn><eisbn>1467308617</eisbn><eisbn>9781467308618</eisbn><abstract>A new micromachined wideband frequency reconfigurable microstrip patch antenna is demonstrated in this paper. The tunable antenna system is fabricated by a combination of surface and bulk micromachining processes. Thermal actuation is employed to precisely adjust the operating frequency with voltage ranges compatible with today's CMOS circuitries. A bulk micromachined silicon membrane containing thermal actuators serves as a platform for antenna patch. The patch is excited by a 50Ω feed line through proximity coupling. The out-of-plane motion of the thermal actuators normal to the antenna surface deflects the patch downward respect to the fixed ground plane. This deflection reduces the air gap height between the antenna patch and feed line and consequently, resonant frequency of the antenna. The effect of initial air gap height on achievable tuning range and bandwidth of the antenna is also investigated and the optimum range is presented. The up-state operating frequency of the antenna is 22.61GHz which continuously can be lowered to 22.17GHz. A tuning range of 440MHz was achieved by a CMOS compatible actuation voltage of 1.5V. The bandwidth of the antenna for up and down-state positions are 1.34 and 1.27GHz respectively. The RF performance of the antenna and its mechanical behavior is investigated by FEM analysis and satisfactory results are obtained within the tuning range.</abstract><pub>IEEE</pub><doi>10.1109/ISMA.2012.6215169</doi><tpages>6</tpages></addata></record> |
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| identifier | ISBN: 9781467308601 |
| ispartof | 2012 8th International Symposium on Mechatronics and its Applications, 2012, p.1-6 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Actuators electro-thermal microactuator frequency reconfigurable Microelectromechanical systems (MEMS) micromachining Microstrip antennas microstrip patch antenna Patch antennas Resonant frequency Silicon Tuning wideband |
| title | A new design of MEMS-based wideband frequency reconfigurable microstrip patch antenna |
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