A flexible evaporation micropump with precision flow rate control for micro-fluidic systems

This paper proposes an active-evaporation micropump for micro-fluidic system. The flexible micropump featured power, cost and space efficient structure, capable of stable and adjustable flow-rate control during long working periods. Both passive and active evaporation pumping modes have been studied...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kuan-Yu Chen, Kuang-En Chen, Wang, K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	active-evaporation micropump Fabrication flowrate control Heating micro-fluidic Micropumps
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