$Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique$

Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique

A step gauge is a measurement standard that is used to verify a Coordinate Measuring Machine (CMM). The better the calibration system for the step gauge is, the greater the CMM verification can be. To achieve good step gauge calibration results, step gauge interferometry calibrator has been develope...

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Hauptverfasser:	Vacharanukul, K., Sudatham, W., Tonmueanwai, A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Calibration Coordinate measuring machines Equations Mathematical model Measurement by laser beam Real time systems Refractive index
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creator	Vacharanukul, K. Sudatham, W. Tonmueanwai, A.
description	A step gauge is a measurement standard that is used to verify a Coordinate Measuring Machine (CMM). The better the calibration system for the step gauge is, the greater the CMM verification can be. To achieve good step gauge calibration results, step gauge interferometry calibrator has been developed using a four-path laser interferometer system with the implementation of the real-time air refractive index compensation system. The system achieves the measurement uncertainty of 0.7 μm (1=2) at the length of 1 m.
doi_str_mv	10.1109/IQEC-CLEO.2011.6193993
format	Conference Proceeding
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The system achieves the measurement uncertainty of 0.7 μm (1=2) at the length of 1 m.</description><subject>Calibration</subject><subject>Coordinate measuring machines</subject><subject>Equations</subject><subject>Mathematical model</subject><subject>Measurement by laser beam</subject><subject>Real time systems</subject><subject>Refractive index</subject><isbn>1457719398</isbn><isbn>9781457719394</isbn><isbn>1457719401</isbn><isbn>9781457719400</isbn><isbn>9780977565788</isbn><isbn>0977565785</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2011</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo9kF9LwzAUxSMiqHOfQJB8gc6kSZPmUUrVQcdQ9Hmk6c0W6T-TTLdvb2HD83J-h8O9DwehB0oWlBL1uHwri6SoyvUiJZQuBFVMKXaBbinPpKSKE3r5H5jKr9E8hC8ySRImcnKDDu-g2yS6DrB2HnuwXpvofgC7voEDNkM3Qh90dEOPB4tbHcBPXQRvwQ8dTIDDMUTosB0mjDDird5vARvdutqfLn9d3OFitcIRzK5333u4Q1dWtwHmZ5-hz-fyo3hNqvXLsniqEkdzEROWNTrLreKSqIaZXCrWCMGaLNeG8HQisKymnCuhiDCCS5mKWvCMKhBCSjZD96e_DgA2o3ed9sfNeSn2B16dXyo</recordid><startdate>201108</startdate><enddate>201108</enddate><creator>Vacharanukul, K.</creator><creator>Sudatham, W.</creator><creator>Tonmueanwai, A.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201108</creationdate><title>Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique</title><author>Vacharanukul, K. ; Sudatham, W. ; Tonmueanwai, A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i186t-35da58f94709d3c8793d663d58ac04263def3b14496906c647726b64519e66773</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Calibration</topic><topic>Coordinate measuring machines</topic><topic>Equations</topic><topic>Mathematical model</topic><topic>Measurement by laser beam</topic><topic>Real time systems</topic><topic>Refractive index</topic><toplevel>online_resources</toplevel><creatorcontrib>Vacharanukul, K.</creatorcontrib><creatorcontrib>Sudatham, W.</creatorcontrib><creatorcontrib>Tonmueanwai, A.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Vacharanukul, K.</au><au>Sudatham, W.</au><au>Tonmueanwai, A.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique</atitle><btitle>2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim incorporating the Australasian Conference on Optics, Lasers and Spectroscopy and the Australian Conference on Optical Fibre Technology</btitle><stitle>IQEC-CLEO</stitle><date>2011-08</date><risdate>2011</risdate><spage>1978</spage><epage>1980</epage><pages>1978-1980</pages><isbn>1457719398</isbn><isbn>9781457719394</isbn><eisbn>1457719401</eisbn><eisbn>9781457719400</eisbn><eisbn>9780977565788</eisbn><eisbn>0977565785</eisbn><abstract>A step gauge is a measurement standard that is used to verify a Coordinate Measuring Machine (CMM). The better the calibration system for the step gauge is, the greater the CMM verification can be. To achieve good step gauge calibration results, step gauge interferometry calibrator has been developed using a four-path laser interferometer system with the implementation of the real-time air refractive index compensation system. The system achieves the measurement uncertainty of 0.7 μm (1=2) at the length of 1 m.</abstract><pub>IEEE</pub><doi>10.1109/IQEC-CLEO.2011.6193993</doi><tpages>3</tpages></addata></record>
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identifier	ISBN: 1457719398
ispartof	2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim incorporating the Australasian Conference on Optics, Lasers and Spectroscopy and the Australian Conference on Optical Fibre Technology, 2011, p.1978-1980
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language	eng
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source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Calibration Coordinate measuring machines Equations Mathematical model Measurement by laser beam Real time systems Refractive index
title	Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique
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