Microfluidic platforms realized by micromachining and anodic bonding of Si and glass substrates

Presented work focuses mainly on issues accompanied with defect free anodic bonding of multilayer glass-Si-glass microfluidic structures. The problems associated with prefabricated structures which included micromachined or patterned topography on one or both of the mating surfaces and bonding to Si...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Resnik, D., Aljancic, U., Vrtacnik, D., Mozek, M., Pecar, B., Amon, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	anodic bonding Bonding Glass glass etching Microchannel Microfluidics Silicon Substrates Surface treatment
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