The effect of H2 treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system

In this report, we studied the fabrication of heterojunction with intrinsic thin layer (HIT) solar cell, which was deposited by using very high frequency chemical vapor deposition (VHF-PECVD), at a high deposition rate under a low process temperature. The HIT solar cell has a very thin emitter layer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Man-Chi Huang, Chia-Hua Chang, Fang-Ming Li, Ching-Hsiang Hsu, Binh-Tinh Tran, Tang, S. S., Kung-Liang Lin, Yueh-Chin Lin, Fu-Ching Tung, Muh-Wang Liang, Yi-Chang, E.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Performance evaluation Photovoltaic cells Plasma temperature Sputtering Surface treatment
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