A new method for rapid measurement of orientations and sizes of grains in multicrystalline silicon wafers

We describe a new technique for rapid measurement of orientations and sizes of various grains in a multicrystalline silicon (mc-Si) wafer. The wafer is texture etched to expose (111) faces nearest to each surface. Because grains of different orientations result in uniquely different texture shapes,...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Sopori, Bhushan, Guhabiswas, D., Rupnowski, P., Shet, S., Devayajanam, S., Moutinho, H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!