Studies on the use of liquid surface passivation for lifetime measurements on good-quality silicon wafers

We evaluated several liquid passivants, viz. solutions of iodine ethanol (IE), quinhydrone methanol (QHM), and potassium cyanide (KCN), for measuring minority-carrier lifetime. Lifetime was measured by the WCT-100 (Sinton Instruments) and WT-2000 (Semilab). Our results show that both IE and QHM pass...

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Hauptverfasser: Devayajanam, S., Rupnowski, P., Shet, S., Sopori, B. L., Ravindra, N. M., Caskey, D., Chang, J., Covington, J.
Format: Tagungsbericht
Sprache:eng
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