Effect of two types of surface sites on the characteristics of Si/sub 3/N/sub 4/-gate pH-ISFET's

Based on the site-binding model, the effects of two types of surface-sites (namely, silanol site and amine site) and their ratio on the characteristics of Si/sub 3/N/sub 4/-gate pH-ISFET are discussed. As the ratio /spl beta/ of silanol sites to amine sites is about 7/3, the maximum of the sensitivi...

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Bibliographische Detailangaben

Hauptverfasser:	Meng-Nian Niu, Xin-Fang Ding, Qin-Yi Tong
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Boltzmann equation Chemical processes FETs Insulation Microelectronics Protons Sensor phenomena and characterization Silicon Stability Surface treatment
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