Loss mechanisms and quality factor improvement for inductors in high-resistivity SOI processes

Silicon-on-insulator processes have the potential to realize high-quality factors in spiral inductors, but only if the loss mechanisms involved are clearly understood. Partially-depleted SOI (PD-SOI) processes must address losses in the semiconducting Silicon layer below the spiral inductor turns, e...

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Bibliographische Detailangaben

1. Verfasser:	Kuhn, W. B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	inductor Inductors Metals quality factor Resistance Silicon Silicon on insulator technology SOI Spirals Substrates
Online-Zugang:	Volltext bestellen
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