Influence of the oxygen flow rate on the plasma parameters in reactive magnetron sputtering plasma using Zn target

Aluminum-doped zinc oxide (AZO) and zinc oxide (ZnO) are promising materials which have been investigated for photovoltaic and photosensor applications. The applications of ZnO based thin films are due to several unique material properties where it is a II-IV semiconductor with a wide direct bandgap...

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Bibliographische Detailangaben

Hauptverfasser:	Nayan, N., Ali, R. A. M., Mamat, M. H., Mahmood, M. R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Argon Discharges (electric) Fluid flow Plasma temperature Sputtering Temperature measurement
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