Accelerated testing of anodically bonded glass-silicon packages in salt water
This paper reports long-term accelerated test results of glass-silicon packages in aqueous solutions including phosphate buffered saline (PBS) and de-ionized water. An analysis of the dominant failure mode and the long term biocompatibility of the packages is also performed. Using the accelerated da...
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| creator | Dokmeci, M.R. von Arx, J.A. Najafi, K. |
| description | This paper reports long-term accelerated test results of glass-silicon packages in aqueous solutions including phosphate buffered saline (PBS) and de-ionized water. An analysis of the dominant failure mode and the long term biocompatibility of the packages is also performed. Using the accelerated data at 85 and 95/spl deg/C in saline with an Arrhenius model we calculate an activation energy of 1.26 eV and an expected lifetime of 177 years at 37/spl deg/C in saline. After an analysis of the failed samples, we find that the main failure mechanism is the dissolution of the polysilicon layer at elevated temperatures in saline, which causes premature failure of the package. In animal models the package is consistently found to be biocompatible and robust after implantation periods of up to a year. |
| doi_str_mv | 10.1109/SENSOR.1997.613639 |
| format | Conference Proceeding |
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An analysis of the dominant failure mode and the long term biocompatibility of the packages is also performed. Using the accelerated data at 85 and 95/spl deg/C in saline with an Arrhenius model we calculate an activation energy of 1.26 eV and an expected lifetime of 177 years at 37/spl deg/C in saline. After an analysis of the failed samples, we find that the main failure mechanism is the dissolution of the polysilicon layer at elevated temperatures in saline, which causes premature failure of the package. In animal models the package is consistently found to be biocompatible and robust after implantation periods of up to a year.</description><identifier>ISBN: 9780780338296</identifier><identifier>ISBN: 0780338294</identifier><identifier>DOI: 10.1109/SENSOR.1997.613639</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acceleration ; Animals ; Bonding ; Failure analysis ; Life estimation ; Packaging ; Performance analysis ; Robustness ; Temperature ; Testing</subject><ispartof>Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 1997, Vol.1, p.283-286 vol.1</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c689-a4a105ab45276793a2166d7d79507aa0481d0434b08eb87d819c2598d262ef53</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/613639$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/613639$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Dokmeci, M.R.</creatorcontrib><creatorcontrib>von Arx, J.A.</creatorcontrib><creatorcontrib>Najafi, K.</creatorcontrib><title>Accelerated testing of anodically bonded glass-silicon packages in salt water</title><title>Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)</title><addtitle>SENSOR</addtitle><description>This paper reports long-term accelerated test results of glass-silicon packages in aqueous solutions including phosphate buffered saline (PBS) and de-ionized water. An analysis of the dominant failure mode and the long term biocompatibility of the packages is also performed. Using the accelerated data at 85 and 95/spl deg/C in saline with an Arrhenius model we calculate an activation energy of 1.26 eV and an expected lifetime of 177 years at 37/spl deg/C in saline. After an analysis of the failed samples, we find that the main failure mechanism is the dissolution of the polysilicon layer at elevated temperatures in saline, which causes premature failure of the package. In animal models the package is consistently found to be biocompatible and robust after implantation periods of up to a year.</description><subject>Acceleration</subject><subject>Animals</subject><subject>Bonding</subject><subject>Failure analysis</subject><subject>Life estimation</subject><subject>Packaging</subject><subject>Performance analysis</subject><subject>Robustness</subject><subject>Temperature</subject><subject>Testing</subject><isbn>9780780338296</isbn><isbn>0780338294</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1997</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj9tKw0AURQdEUGp-oE_zA6lzvzyWUi9QLRjfy8nMSRgdk5IJSP_eQN1s2A8LFmxC1pxtOGf-sdm_N8ePDffebgyXRvobUnnr2FIpnfDmjlSlfLElSmtu2T1524aAGSeYMdIZy5yGno4dhWGMKUDOF9qOQ1xgn6GUuqScwjjQM4Rv6LHQNNACeaa_i2F6ILcd5ILV_65I87T_3L3Uh-Pz6257qINxvgYFnGlolRbWWC9BcGOijdZrZgGYcjwyJVXLHLbORsd9ENq7KIzATssVWV-tCRFP5yn9wHQ5XR_LP3TcS88</recordid><startdate>1997</startdate><enddate>1997</enddate><creator>Dokmeci, M.R.</creator><creator>von Arx, J.A.</creator><creator>Najafi, K.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1997</creationdate><title>Accelerated testing of anodically bonded glass-silicon packages in salt water</title><author>Dokmeci, M.R. ; von Arx, J.A. ; Najafi, K.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c689-a4a105ab45276793a2166d7d79507aa0481d0434b08eb87d819c2598d262ef53</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1997</creationdate><topic>Acceleration</topic><topic>Animals</topic><topic>Bonding</topic><topic>Failure analysis</topic><topic>Life estimation</topic><topic>Packaging</topic><topic>Performance analysis</topic><topic>Robustness</topic><topic>Temperature</topic><topic>Testing</topic><toplevel>online_resources</toplevel><creatorcontrib>Dokmeci, M.R.</creatorcontrib><creatorcontrib>von Arx, J.A.</creatorcontrib><creatorcontrib>Najafi, K.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Dokmeci, M.R.</au><au>von Arx, J.A.</au><au>Najafi, K.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Accelerated testing of anodically bonded glass-silicon packages in salt water</atitle><btitle>Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)</btitle><stitle>SENSOR</stitle><date>1997</date><risdate>1997</risdate><volume>1</volume><spage>283</spage><epage>286 vol.1</epage><pages>283-286 vol.1</pages><isbn>9780780338296</isbn><isbn>0780338294</isbn><abstract>This paper reports long-term accelerated test results of glass-silicon packages in aqueous solutions including phosphate buffered saline (PBS) and de-ionized water. An analysis of the dominant failure mode and the long term biocompatibility of the packages is also performed. Using the accelerated data at 85 and 95/spl deg/C in saline with an Arrhenius model we calculate an activation energy of 1.26 eV and an expected lifetime of 177 years at 37/spl deg/C in saline. After an analysis of the failed samples, we find that the main failure mechanism is the dissolution of the polysilicon layer at elevated temperatures in saline, which causes premature failure of the package. In animal models the package is consistently found to be biocompatible and robust after implantation periods of up to a year.</abstract><pub>IEEE</pub><doi>10.1109/SENSOR.1997.613639</doi></addata></record> |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acceleration Animals Bonding Failure analysis Life estimation Packaging Performance analysis Robustness Temperature Testing |
| title | Accelerated testing of anodically bonded glass-silicon packages in salt water |
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