Thin Film Solar Cells Fabricated Using Cross-Shaped Pattern Epilayer Lift-Off Technology for Substrate Recycling Applications

This study reports the use of cross-shaped pattern epitaxial lift-off (ELO) technology to release crack-free single crystal epilayers with a solar cell structure from a gallium arsenide (GaAs) substrate. A cross-shaped pattern array was used to define cell size and provide the etch path for the etch...

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Veröffentlicht in:	IEEE transactions on electron devices 2012-03, Vol.59 (3), p.666-672
Hauptverfasser:	HORNG, Ray-Hua, TSENG, Ming-Chun, WU, Fan-Lei, LI, Chia-Hao, WU, Chih-Hung, YANG, Min-De
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chemicals Electronics Energy Epitaxial lift-off (ELO) Etching Exact sciences and technology Gallium arsenide Natural energy Nickel Optoelectronic devices Photovoltaic cells Photovoltaic conversion recycled substrate Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Solar cells. Photoelectrochemical cells Solar energy Substrates thin film solar cell
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