Hydrogen detection using thermally actuated MEMS resonators

This work demonstrates the potential of thermally actuated micro-electromechanical resonators to be used as highly sensitive and fast sensors distinguishing between different gases and gas mixtures based on their thermo-physical properties. This approach is especially suitable for detection of hydro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tousifar, B., Rahafrooz, A., Pourkamali, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Conductivity Frequency measurement Heating Resonant frequency Sensors Temperature measurement Thermal conductivity
Online-Zugang:	Volltext bestellen
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