Design and fabrication of electro-thermally activated micro gripper with large tip opening and holding force

This paper reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven jointly by a new metallic V-shape actuator (VSA), and a set of modified Guckel U-shape actuators (mUSA). The modification of the angle between the hot and cold arms in the mUSA...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Khazaai, J. J., Qu, H., Shillor, M., Smith, L.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Analytical models Force Grippers Micromechanical devices Temperature measurement Voltage measurement
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