An inertial smart-sensor based on silicon nanowires for wireless sportive activity monitoring

This paper presents the design of a CMOS integrated circuit dedicated to the hybrid integration of a three-axis inertial smart-sensor with digital interface. Inertial sensing is achieved with an innovative low-cost technology that implements piezoresistive detection in MEMS devices with single-cryst...

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Hauptverfasser: Leman, O., Boujamaa, E. M., Rahajandraibe, W., Kussener, E., Meillere, S., Barthelemy, H., Jourdan, G., Rey, P.
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creator Leman, O.
Boujamaa, E. M.
Rahajandraibe, W.
Kussener, E.
Meillere, S.
Barthelemy, H.
Jourdan, G.
Rey, P.
description This paper presents the design of a CMOS integrated circuit dedicated to the hybrid integration of a three-axis inertial smart-sensor with digital interface. Inertial sensing is achieved with an innovative low-cost technology that implements piezoresistive detection in MEMS devices with single-crystal silicon nanowires. The circuit includes a custom-designed analog front-end that achieves the bias and readout of the sensor, and an analog-to-digital converter with oversampling and integrated digital decimation. The obtained smart-sensor features a reduced output data rate that is suitable for a wireless sensor network with direct transmission of the raw data to a remote base station.
doi_str_mv 10.1109/ICSENS.2011.6127112
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subjects CMOS integrated circuits
Finite impulse response filter
Low pass filters
Nanowires
Noise
Wireless communication
Wireless sensor networks
title An inertial smart-sensor based on silicon nanowires for wireless sportive activity monitoring
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