Polymer microcantilevers for thermal sensing

We present a polymer thermal bimorph microcantilever with integrated gold actuator and sensor. Our device reports an enhanced direct thermal response, and 30% increase in sensitivity compared to prior devices using NiChrome sensor. Releasing the cantilever from the substrate enhanced the response by...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Williamson Hodge, Lucy A., Dunn, R. J., Ibbotson, R. H., Huq, S. E., Kar, A. K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Conductivity Heating Polyimides Resistance Temperature measurement Temperature sensors
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!