Piezo-hall effect in CMOS-based vertical hall devices

This paper reports on the piezo-Hall effect in CMOS-based five-contact vertical Hall sensors (VHS) able to measure in-plane magnetic field components. The geometry of such devices and the characteristic current flow in the deep n-wells strongly differ from those of structures used so far to characte...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kaufmann, T., Kopp, D., Kunzelmann, M., Ruther, P., Paul, O.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Magnetic fields Magnetic sensors Piezoresistance Sensitivity Silicon Stress
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