Fabrication of Highly Ordered Cylindrical Nanopores with Modulated Diameter Using Anodic Alumina

We propose two novel methods for fabrication of highly ordered cylindrical nanopores with modulated diameter using anodic aluminum oxide (AAO) template. These are (a) multistep anodization in which each step is separated from the next by a controlled wet etching process, and (b) lateral hard anodiza...

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Hauptverfasser: Bodepudi, S. C., Bachman, D., Pramanik, S.
Format: Tagungsbericht
Sprache:eng
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