Point-to-point control of a high accuracy positioning mechanism

Compares three open-loop command generating methods for the point-to-point control of a wafer stage. Whereas the theoretical time-optimal bang-bang force command results in excessive residual vibration due to excitation of resonant modes, shaped force profiles have the property not to excite these m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	De Roover, D., Sperling, F.B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Control systems Force feedback Motion control Open loop systems Position control Resonance Signal design Tracking Vibrations
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