Mechanical and Electronic Amplitude-Limiting Techniques in a MEMS Resonant Accelerometer

Two methods for limiting the oscillation amplitude in micromechanical resonators, typically used in many kinds of MEMS sensors, are discussed and compared. First, it is shown how the presence of parasitic capacitances sets several constraints on the design of the oscillating circuit gain and bandwid...

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Veröffentlicht in:	IEEE sensors journal 2012-06, Vol.12 (6), p.1719-1725
Hauptverfasser:	Tocchio, A., Caspani, A., Langfelder, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometer Accelerometers Capacitance Frequency measurement mechanical nonlinearities MEMS resonator Micromechanical devices Oscillators Resonant frequency RLC circuits transimpedance amplifier
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