Hilbert-Peano curve descriptions of layouts for contact resistance test structures in CMOS

An algorithm based upon Hilbert-Peano curves is presented for generating contact resistance test measurement layouts. The resulting contact chain path contains an excellent distribution of segment orientations, and uses all available test points within a grid. L-systems are presented as a useful way...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MacEachern, L.A., Manku, T.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Automatic testing Circuit simulation Circuit testing Contact resistance Electric variables measurement Electrical resistance measurement Fabrication Hilbert space Manufacturing Semiconductor device modeling
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