Applications of SOI Technologies to Communication

This paper presents an overview of emerging SOI technologies and their application to communication ICs. The unique properties of Si and SiO 2 , coupled with the broad range of achievable SiO 2 film thicknesses, allow tuning of existing devices and the design of new devices targeting RF, high-speed...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Plouchart, J-O
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	CMOS integrated circuits Optical switches Photonics Radio frequency Silicon Silicon on insulator technology Substrates
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