A Quantitative Model for ELDRS and Degradation Effects in Irradiated Oxides Based on First Principles Calculations

A physics-based TCAD model for enhanced low-dose-rate sensitivity in linear bipolar devices is developed. Quantitative agreement is found with measured data over a wide range of dose rates and H 2 concentrations. Analysis of the degradation effects of individual defect types, the implementation of w...

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Veröffentlicht in:IEEE transactions on nuclear science 2011-12, Vol.58 (6), p.2937-2944
Hauptverfasser: Rowsey, N. L., Law, M. E., Schrimpf, R. D., Fleetwood, D. M., Tuttle, B. R., Pantelides, S. T.
Format: Artikel
Sprache:eng
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Zusammenfassung:A physics-based TCAD model for enhanced low-dose-rate sensitivity in linear bipolar devices is developed. Quantitative agreement is found with measured data over a wide range of dose rates and H 2 concentrations. Analysis of the degradation effects of individual defect types, the implementation of which has been informed by first principles calculations, provides insights into the mechanisms behind enhanced low-dose-rate effects in different hydrogen environments. The effects of initial defect concentration and location and the energetics of the defect-related reactions are explored. Conclusions are drawn about the roles of molecular hydrogen and hydrogenated defects in the radiation response of these devices.
ISSN:0018-9499
1558-1578
DOI:10.1109/TNS.2011.2169458