A Load-Lock-Compatible Nanomanipulation System for Scanning Electron Microscope

This paper presents a nanomanipulation system for operation inside scanning electron microscopes (SEM). The system is compact, making it capable of being mounted onto and demounted from an SEM through the specimen-exchange chamber (load-lock) without breaking the high vacuum of the SEM. This advance...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE/ASME transactions on mechatronics 2013-02, Vol.18 (1), p.230-237
Hauptverfasser:	Yan Liang Zhang, Yong Zhang, Changhai Ru, Chen, B. K., Yu Sun
Format:	Artikel
Sprache:	eng
Schlagworte:	Accuracy Actuators Algorithms Chambers Contact detection Control systems End effectors Industrial equipment Mechatronics Nanocomposites nanomanipulation system Nanomaterials Nanostructure Noise Optical imaging scanning electron microscope (SEM) Scanning electron microscopy system characterization visual servoing
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!