Scanning infrared microscope
Scanning infrared microscope (SIRM) based on InAs matrix or InSb line photo detector is described.
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| creator | Mzhelskiy, I. V. Polovinkin, V. G. |
| description | Scanning infrared microscope (SIRM) based on InAs matrix or InSb line photo detector is described. |
| doi_str_mv | 10.1109/EDM.2011.6006939 |
| format | Conference Proceeding |
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| identifier | ISSN: 1815-3712 |
| ispartof | 2011 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Proceedings, 2011, p.330-332 |
| issn | 1815-3712 |
| language | eng |
| recordid | cdi_ieee_primary_6006939 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Detectors Infrared Light emitting diodes microscope Optical microscopy Physics Scanning electron microscopy SIRM Software |
| title | Scanning infrared microscope |
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