In Situ Tuning of Focused-Ion-Beam Defined Nanomechanical Resonators Using Joule Heating

Nanomechanical resonators have a huge potential for a variety of applications, including high-resolution mass sensing. In this paper, we demonstrate a novel rapid prototyping method for fabricating nanoelectromechanical systems using focused-ion-beam milling as well as in situ electromechanical char...

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Veröffentlicht in:	Journal of microelectromechanical systems 2011-10, Vol.20 (5), p.1074-1080
Hauptverfasser:	Homann, L. V., Booth, T., Lei, A., Petersen, D. H., Davis, Z. J., Boggild, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Cross-disciplinary physics: materials science rheology Devices Exact sciences and technology Focused ion beam Heating Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Mechanical instruments, equipment and techniques Methods of nanofabrication Micromechanical devices and systems Milling Nanocomposites nanoelectromechancial systems Nanoelectromechanical systems nanofabrication nanolithography Nanomaterials nanopatterning Nanostructure nanotechnology Physics Q factor Rapid prototyping Resistance Resonant frequencies Resonant frequency Resonators Silicon transmission electron microscopy Tuning
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