A poly-Si based 2-axis differential capacitive-sensing accelerometer

This study reports the design and implementation of a 2-axis capacitive-type accelerometer design consists of a pendulum-proofmass (bulk Si), a gimbal-spring (poly-Si film), and vertical-comb sensing electrodes. This design has three merits, (1) pendulum-proofmass to produce torque by in-plane accel...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chun-Kai Chan, Yu-Che Huang, Mingching Wu, Weileun Fang
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Micromechanical devices Sensors Silicon
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