Bulk acoustic waves in multilayer structures
A theoretical investigation of bulk acoustic waves in multilayer structures is presented. This investigation is based on a rigorous solution of wave equations with correct boundary conditions on all the layer surfaces. Obtained results give a possibility to calculate the film bulk acoustic wave reso...
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| Format: | Tagungsbericht |
| Sprache: | eng |
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| Zusammenfassung: | A theoretical investigation of bulk acoustic waves in multilayer structures is presented. This investigation is based on a rigorous solution of wave equations with correct boundary conditions on all the layer surfaces. Obtained results give a possibility to calculate the film bulk acoustic wave resonators with arbitrary quantity of layers, including the resonators with Bragg reflector. A frequency response, a resonance frequency, a temperature coefficient of frequency and a spatial distribution of all the wave parameters are available for these calculations. |
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| DOI: | 10.1109/ICMT.2011.6002436 |